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Tokyo Electron Ltd

Tokyo Elec

Active Patents

0

Total Holdings

5

Patent Holdings

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Patent No.	Title	Status	Filing Date	Grant Date	Claims	Actions
JPS63252437A	Inspection device	Expired / Lapsed	1987-04-09	—	0	Details
US5364222A	Apparatus for processing wafer-shaped substrates	Expired / Lapsed	1993-02-05	1994-11-15	24	Details
US5198752A	Electric probing-test machine having a cooling system	Expired / Lapsed	1991-07-31	1993-03-30	7	Details
US4829559A	Facsimile apparatus with a mode for receiving non-image inf…	Expired / Lapsed	1987-04-27	1989-05-09	21	Details
US4581118A	Shaped field magnetron electrode	Expired / Lapsed	1983-01-26	1986-04-08	18	Details