Therma Wave Inc
Therma WavActive Patents
0
Total Holdings
5
Patent Holdings
Filter in Explorer →| Patent No. | Title | Status | Filing Date | Grant Date | Claims | Actions |
|---|---|---|---|---|---|---|
| US20020159054A1 | Wafer chuck with integrated reference sample | Expired / Lapsed | 2002-01-14 | — | 30 | Details |
| US6771372B1 | Rotational stage with vertical axis adjustment | Expired / Lapsed | 2002-06-24 | 2004-08-03 | 21 | Details |
| US4634290A | Method and apparatus for detecting thermal waves | Expired / Lapsed | 1985-11-14 | 1987-01-06 | 10 | Details |
| US4579463A | Detecting thermal waves to evaluate thermal parameters | Expired / Lapsed | 1984-05-21 | 1986-04-01 | 9 | Details |
| US4513384A | Thin film thickness measurements and depth profiling utiliz… | Expired / Lapsed | 1982-06-18 | 1985-04-23 | 14 | Details |