Sensor element for determining concentrations of materials

Abstract

Abstract Known sensor elements for the optical determination of concentrations of materials in gaseous and liquid samples, in which the indicator substance interacting with the sample is present in an indicator layer, are only suitable to a limited extent for microanalysis devices, as a result of their size or that of the devices for measuring the fluorescent light. In order to circumvent these disadvantages, it is proposed to integrate photosensitive elements 3 in the form of microstructures, together with their electrical contacting means, in a planar arrangement in a substrate 3', which is present as a thin layer in the sensor element. The photoelectric elements 3 and the indicator layer 6 or indicator substance 7, 7' of these planar optical sensor elements are applied with the aid of microelectronic techniques. <IMAGE>

Inventors

• 👤 Hermann Dipl Ing Dr Marsoner
• 👤 Hellfried Dr Karpf
• 👤 Alfred Dr Leitner

Bibliographic Details