DE3402664A1
Expired / Lapsed
DE
⏱️ 0.0 years remaining
METHOD FOR TREATING AND / OR HANDLING WAFERS AND DEVICE FOR CARRYING OUT THE METHOD
Assignee: ASML US Inc
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Filing: 1984-01-24
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Granted: —
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Expires: 2004-01-24
Abstract
No abstract record available.
Inventors
- 👤 Jalal 94043 Mountain View Calif. Ashjaee
- 👤 Susan 94611 Oakland Calif. Kung
- 👤 Nobuo 95120 San Jose Calif. Kuwaki
- 👤 Tuan 95035 Milpitas Calif. Ngo
- 👤 Johann 95070 Saratoga Calif. Tam
Bibliographic Details
Application Number
—
Jurisdiction
DE
Data Source
google_patents
Last Synchronized
2026-10-24 07:35
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/50; H10P72/53; H10P72/04; H10P72/0431; H10P72/0432; H10P72/0434; H10P72/30; H10P72/32; H10P72/3202; Y; Y10; Y10S; Y10S414/00; Y10S414/135; Y10S414/136
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
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