Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
114 words
A system for transferring a fine pattern onto a target, characterized by comprising: a mask (12) on which are incident X-rays (4) from X-ray emitting means (20, 24) at a predetermined angle (6, ϕ) and which emit diffraction X-rays (8), the mask (-12) including a single crystal (2) having lattice planes (h, k, 1) of a predetermined orientation and a layer (17) of a predetermined pattern which absorbs incident X-rays (4) and diffraction X-rays (8), so that the diffraction X-rays (8) which are not absorbed by the absorber layer (17) are projected to the target (16, 18) and the pattern defined by the X-ray absorbing layer (17) is transferred to the target (16, 18).
Claim 2
Independent Claim
114 words
A system for transferring a fine pattern onto a target, characterized by comprising: a mask (12) on which are incident X-rays (4) from X-ray emitting means (20, 24) at a predetermined angle (6, ϕ) and which emit diffraction X-rays (8), the mask (-12) including a single crystal (2) having lattice planes (h, k, 1) of a predetermined orientation and a layer (17) of a predetermined pattern which absorbs incident X-rays (4) and diffraction X-rays (8), so that the diffraction X-rays (8) which are not absorbed by the absorber layer (17) are projected to the target (16, 18) and the pattern defined by the X-ray absorbing layer (17) is transferred to the target (16, 18).
Claim 3
Dependent Claim
48 words
A system according to claim 1, characterized in that the diffraction X-rays (8) emerge from the lattice plane (h, k, 1) of the single crystal in the regular reflecting direction relative to the surface (6) of the single crystal (2) and become incident on the target (16, 18).
Claim 4
Dependent Claim
102 words
A system according to claim 1, characteried in that the diffraction X-rays (8) emerge from the lattice plane (h, k, ℓ) of the single crystal (2) in the regular reflecting direction relative to the surface (6) of the single crystal (2), the single crystal (2) has a lattice plane (h, k, ℓ) such that the diffraction X-rays (8) become incident on the target (16, 18) in the direction of the normal to the surface of the target (16, 18), and a surface (6) of the single crystal (2) on which is formed the X-ray absorbing layer (17) faces the target (16, 18).
Claim 5
Dependent Claim
46 words
A system according to claim 3, characterized in that a Fresnel zone plate (32) is arranged in a travelling path of the X-rays (8), so that the X-rays (8) are focused, converged by the Fresnel zone plate (32) to be projected on the target (16, 18).
Claim 6
Dependent Claim
33 words
A system according to claim 1, characterized in that the X-ray emitting means (20, 24) includes an X-ray source (20) for emitting X-rays and means (24) for converting the X-rays into monochromatic X-rays.