Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
39 words
An X-ray mask comprising a substantially X-ray absorbing patterned layer supported by a substantially X-ray transparent substrate film, characterised in that said substrate film comprises hydrogenated amorphous carbon and having an optical bandgap of at least one electron volt.
Claim 2
Dependent Claim
39 words
An X-ray mask comprising a substantially X-ray absorbing patterned layer supported by a substantially X-ray transparent substrate film, characterised in that said substrate film comprises hydrogenated amorphous carbon and having an optical bandgap of at least one electron volt.
Claim 3
Dependent Claim
20 words
An X-ray mask substrate as claimed in claim 1, wherein said film has at least 1 atom percent of hydrogen.
Claim 4
Dependent Claim
24 words
An X-ray mask substrate as claimed in claim 1 or 2, wherein said film has an optical bandgap of at least 1.6 electron volts.
Claim 5
Dependent Claim
19 words
An X-ray mask substrate as claimed in claim 3, wherein said film has about 20 atom percent of hydrogen.
Claim 6
Dependent Claim
21 words
An X-ray mask substrate as claimed in claim 1, wherein said film has an optical bandgap of about 2 electron volts.
Claim 7
Dependent Claim
35 words
An X-ray mask substrate as claimed in claimed in any one of the preceding claims, wherein said film has been formed by depositing carbon and hydrogen onto a surface having a temperature less than 375°C.
Claim 8
Dependent Claim
34 words
An X-ray mask substrate as claimed in any one of claims 1 to 5, wherein said film has been formed by depositing carbon and hydrogen onto a surface having a temperature less than 300°C.
Claim 9
Dependent Claim
34 words
An X-ray mask substrate as claimed in any one of claims 1 to 5, wherein said film has been formed by depositing carbon and hydrogen onto a surface having a temperature of about 200°C.
Claim 10
Dependent Claim
36 words
9 . An X -ray mask substrate as claimed in any of the preceding claims, wherein said depositing of carbon and hydrogen has been done by glow discharge of a gaseous medium containing carbon and hydrogen.
Claim 11
Dependent Claim
17 words
An X -ray mask substrate as claimed in claim 9, wherein said gaseous medium comprises acetylene gas.
Claim 12
Dependent Claim
37 words
An X-ray mask substrate as claimed in any one of claims 1 to 8, wherein said depositing of carbon and hydrogen has been done by sputtering a carbon target in an inert gaseous medium containing hydrogen gas.
Claim 13
Dependent Claim
25 words
An X-ray mask as claimed in any one of the preceding claims, comprising a frame supporting said X-ray transparent substrate film, said frame comprising silicon.