Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
177 words
An ion shower apparatus comprising: a plasma formation chamber (1, 21) in which a plasma is produced so as to produce ions; a single ion extraction electrode (7, 41, 50) disposed in one portion of said plasma formation chamber (1, 21) and for extracting said ions from said plasma formation chamber (1, 21) so as to form an ion beam (11) in the form of shower; a specimen chamber (2, 22) in which the surface of a specimen (9, 18) is irradiated with said ion beam (11) in the form of shower; and a shield electrode (16, 40) disposed in the vicinity of said ion extraction electrode (7, 41, 50) in said plasma formation chamber (1, 21) and spaced apart from the thickness of the plasma sheath (14) produced over said ion extraction electrode (7, 41, 50), said shield electrode (16, 40) permitting the passage of said plasma therethrough and preventing the electric field produced by said ion extraction electrode (7, 41, 50) substantially from extending to the remaining region of said plasma formation chamber (1, 21).
Claim 2
Dependent Claim
177 words
An ion shower apparatus comprising: a plasma formation chamber (1, 21) in which a plasma is produced so as to produce ions; a single ion extraction electrode (7, 41, 50) disposed in one portion of said plasma formation chamber (1, 21) and for extracting said ions from said plasma formation chamber (1, 21) so as to form an ion beam (11) in the form of shower; a specimen chamber (2, 22) in which the surface of a specimen (9, 18) is irradiated with said ion beam (11) in the form of shower; and a shield electrode (16, 40) disposed in the vicinity of said ion extraction electrode (7, 41, 50) in said plasma formation chamber (1, 21) and spaced apart from the thickness of the plasma sheath (14) produced over said ion extraction electrode (7, 41, 50), said shield electrode (16, 40) permitting the passage of said plasma therethrough and preventing the electric field produced by said ion extraction electrode (7, 41, 50) substantially from extending to the remaining region of said plasma formation chamber (1, 21).
Claim 3
Dependent Claim
30 words
An ion shower apparatus as claimed in claim 1, wherein said plasma is produced in said plasma formation chamber (1, 21) by means of discharge using a thermionic cathode (3).
Claim 4
Dependent Claim
31 words
3 . An ion shower apparatus as claimed in claim 1, wherein said plasma is produced in said plasma formation chamber (1, 21) by the electron cyclotron resonance excited by microwave.
Claim 5
Dependent Claim
23 words
An ion shower apparatus as claimed in claim 1, wherein said ion extraction electrode (7, 41, 50) is made of carbon or silicon.
Claim 6
Dependent Claim
40 words
An ion shower apparatus as claimed in any one of claims 1-4, wherein an insulating member (53) is provided on the surface of said ion extraction electrode (50), said surface being on the side of said plasma formation chamber (21).
Claim 7
Dependent Claim
119 words
An ion shower apparatus comprising: a plasma formation chamber (21) in which a plasma is produced by the electron cyclotron resonance excited_by microwave so as to produce ions; an ion extraction electrode (52) disposed in one portion of said plasma formation chamber (21) and for extracting said ions from said plasma formation chamber (21) so as to form an ion beam (11) in the form of shower; an insulating member (53) provided on the surface of said ion extraction electrode (52), said surface being on the side of said plasma formation chamber (21); and a specimen formation chamber (22) in which the surface of a specimen (9) is irradiated with said ion beam (11) in the form of shower.
Claim 8
Dependent Claim
119 words
An ion shower apparatus comprising: a plasma formation chamber (21) in which a plasma is produced by the electron cyclotron resonance excited_by microwave so as to produce ions; an ion extraction electrode (52) disposed in one portion of said plasma formation chamber (21) and for extracting said ions from said plasma formation chamber (21) so as to form an ion beam (11) in the form of shower; an insulating member (53) provided on the surface of said ion extraction electrode (52), said surface being on the side of said plasma formation chamber (21); and a specimen formation chamber (22) in which the surface of a specimen (9) is irradiated with said ion beam (11) in the form of shower.