Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
131 words
In glow discharge deposition apparatus wherein semiconductor layers are deposited onto a substrate, the deposition apparatus having at least one dedicated deposition chamber which includes a substrate, at least one cathode spaced from the substrate, means for introducing process gases between the substrate and the cathode and means for energizing the at least one cathode to develop an electrodynamic field in which the process gases are disassociated into plasma, the field having a central substantially uniform region separating a pair of nonuniform regions; the improvement characterized by, in combination: means (60) adapted to substantially prevent nonhomogeneous semiconductor films formed by the nonuniform electrodynamic fields from being deposited onto the substrate (11), such that only the substantially homogeneous semiconductor film formed by the central uniform electrodynamic field is deposited onto the substrate.
Claim 2
Dependent Claim
131 words
In glow discharge deposition apparatus wherein semiconductor layers are deposited onto a substrate, the deposition apparatus having at least one dedicated deposition chamber which includes a substrate, at least one cathode spaced from the substrate, means for introducing process gases between the substrate and the cathode and means for energizing the at least one cathode to develop an electrodynamic field in which the process gases are disassociated into plasma, the field having a central substantially uniform region separating a pair of nonuniform regions; the improvement characterized by, in combination: means (60) adapted to substantially prevent nonhomogeneous semiconductor films formed by the nonuniform electrodynamic fields from being deposited onto the substrate (11), such that only the substantially homogeneous semiconductor film formed by the central uniform electrodynamic field is deposited onto the substrate.
Claim 3
Dependent Claim
31 words
An apparatus according to Claim 1, further characterized by the deposition prevention means including a pair of shielding plates (60) operatively associated with each of the at least one cathode (34).
Claim 4
Dependent Claim
53 words
An apparatus according to Claim 2, further characterized by each one of the pair of shielding plates (60) are operatively secured adjacent the substrate (11) in the region of nonuniform electrodynamic fields (B), so that the nonhomogeneous semiconductor films are deposited onto the surface of the shielding plates rather than onto the substrate.
Claim 5
Independent Claim
37 words
An apparatus according to any one of Claims 2 or 3, further characterized by the shielding plates (60) being covered with a polymer coating (61) to prevent glow discharge between the shielding plates and the substrate (11).
Claim 6
Independent Claim
25 words
An apparatus according to any one of Claims 2 to 4, further characterized by the shielding plates (60) being covered with a polyimide coating (61).
Claim 7
Independent Claim
36 words
An apparatus according to any one of Claims 1 to 5, further characterized by the nonuniform electrodynamic fields (B) being developed adjacent the leading and trailing ends of each of the at least one cathode (34).
Claim 8
Independent Claim
56 words
An apparatus according to any one of Claims 2 to 6, further characterized by the shielding plates (60) are approximately 40 cm long, 5 cm wide and are operatively secured to the deposition apparatus (26) so as to substantially blanket the portions of the substrate (11) overlying the leading and trailing ends of the cathode (34).