EP0110165A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
A method of enhancing the contrast of images and materials therefor
Assignee: Shin Etsu MicroSi Inc
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Filing: 1983-10-29
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Granted: —
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Expires: 2003-10-29
Abstract
Abstract The sharpness of an image produced in a layer of photoresist by imagewise exposure of said layer from a light source emitting light of a predetermined wavelength is improved by providing a contrast-enhancing layer comprising a photobleachable compound between the light source and the photoresist layer. The photobleachable compound is sensitive to light having the predetermined wavelength, and has a ratio of extinction coefficient to molecular weight greater than 10 liters per gram-cm when in the unbleached state, and a ratio of extinction coefficient for the unbleached state to extinction coefficient for the bleached state greater than 10. The resulting photoresist images are suitable for the production of integrated circuits.
Inventors
- 👤 Bruce Frederick Griffing
- 👤 Paul Richard West
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-30 22:18
CPC Classifications
C; C07; C07C; C07C255/00; C07C255/63; C07C255/64; C07C291/00; C07C291/02; C07D; C07D455/00; C07D455/03; C07D455/04; G; G03; G03F; G03F7/00; G03F7/004; G03F7/09; G03F7/091
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
97 words
A method of producing an image in a layer of photoresist by imagewise exposure of said layer from a light source, emitting light of a predetermined wavelength wherein a contrast-enhancing layer comprising a photobleachable compound is provided between the light source and the photoresist layer, the photobleachable compound is sensitive to light having the predetermined wavelength, and has a ratio of extinction coefficient to molecular weight greater than 10 liters per gram-cm when in the unbleached state, and a ratio of extinction coefficient for the unbleached state to extinction coefficient for the bleached state greater than 10.
Claim 2
Independent Claim
97 words
A method of producing an image in a layer of photoresist by imagewise exposure of said layer from a light source, emitting light of a predetermined wavelength wherein a contrast-enhancing layer comprising a photobleachable compound is provided between the light source and the photoresist layer, the photobleachable compound is sensitive to light having the predetermined wavelength, and has a ratio of extinction coefficient to molecular weight greater than 10 liters per gram-cm when in the unbleached state, and a ratio of extinction coefficient for the unbleached state to extinction coefficient for the bleached state greater than 10.
Claim 3
Dependent Claim
55 words
A method as claimed in Claim 1 wherein the ratio of extinction coefficient to molecular weight of said photobleachable compound in the unbleached state is greater than 100 and the ratio of the extinction coefficient for the unbleached state to the extinction coefficient for the bleached state of said photobleachable compound is greater than 30.
Claim 4
Dependent Claim
16 words
A method as claimed in Claim 1 wherein the photobleachable compound is an aryl nitrone compound.
Claim 5
Dependent Claim
23 words
A method as claimed in Claim 3 wherein the aryl nitrone is α-(4-diethylaminophenyl)-N-phenyl- nitrone and the predetermined wavelength of light is 405 nanometers.
Claim 6
Independent Claim
20 words
A method as claimed in any preceding Claim wherein the contrast enhancing layer is contiguous to the layer of photoresist.
Claim 7
Dependent Claim
32 words
A method as claimed in Claim 5 wherein the thickness of the photoresist layer is less than 3 microns and the thickness of the contrast enhancing layer is less than 1 micron.
Claim 8
Dependent Claim
43 words
A photobleachable composition having an extinction coefficient to molecular weight ratio in liters per gram-centimeter in an unbleached state of greater than 10, and a ratio of extinction coefficient for the unbleached state to extinction coefficient for the bleached state greater than 10.
Claim 9
Dependent Claim
43 words
A photobleachable composition having an extinction coefficient to molecular weight ratio in liters per gram-centimeter in an unbleached state of greater than 10, and a ratio of extinction coefficient for the unbleached state to extinction coefficient for the bleached state greater than 10.
Claim 10
Dependent Claim
10 words
A photobleachable composition of claim 7 which comprises a nitrone.
Claim 11
Dependent Claim
12 words
A photobleachable composition as claimed in Claim 7 which includes a binder.
Claim 12
Dependent Claim
54 words
A spin castable mixture capable of forming a photobleachable layer having an absorption maximum in the range of 300 to 450 nanometers which comprises by weight (A) 100 parts of an organic solvent. (B) 1 to 30 parts of an inert organic polymer binder, and (c) 1 to 30 parts of an aryl nitrone.
Claim 13
Dependent Claim
54 words
A spin castable mixture capable of forming a photobleachable layer having an absorption maximum in the range of 300 to 450 nanometers which comprises by weight (A) 100 parts of an organic solvent. (B) 1 to 30 parts of an inert organic polymer binder, and (c) 1 to 30 parts of an aryl nitrone.
Claim 14
Dependent Claim
27 words
An aryl nitrone having an absorption maximum in the range of 300-450 nanometers selected from α-(4-diethylaminophenyl)-N-phenylnitrone, α-(4-diethylaminophenyl)-N-(4-chlorophenyl)nitrone, α-(4-diethylaminophenyl)-N-(3,4-dichlorophenyl)-nitrone, α-(4-diethylaminophenyl)-N-(4-ethoxycarbonylphenyl)-nitrone, α-(4-diethylaminophenyl)-N-(4-acetylphenyl)nitrone, o(-(9-julolidinyl)-N-phenylnitrone, α-(9-julolidinyl)-N-(4-chlorophenyl)nitrone, α-(4-dimethylaminophenyl)-N-(4-cyanophenyl)nitrone, α-(4-methoxyphenyl)-N-(4-cyanophenyl)nitrone. α-[2-(1-phenylpropenyl)]-N-phenylnitrone, and α-[2-(1,1-diphenylethenyl)]-N-phenylnitrone.
Claim 15
Dependent Claim
27 words
An aryl nitrone having an absorption maximum in the range of 300-450 nanometers selected from α-(4-diethylaminophenyl)-N-phenylnitrone, α-(4-diethylaminophenyl)-N-(4-chlorophenyl)nitrone, α-(4-diethylaminophenyl)-N-(3,4-dichlorophenyl)-nitrone, α-(4-diethylaminophenyl)-N-(4-ethoxycarbonylphenyl)-nitrone, α-(4-diethylaminophenyl)-N-(4-acetylphenyl)nitrone, o(-(9-julolidinyl)-N-phenylnitrone, α-(9-julolidinyl)-N-(4-chlorophenyl)nitrone, α-(4-dimethylaminophenyl)-N-(4-cyanophenyl)nitrone, α-(4-methoxyphenyl)-N-(4-cyanophenyl)nitrone. α-[2-(1-phenylpropenyl)]-N-phenylnitrone, and α-[2-(1,1-diphenylethenyl)]-N-phenylnitrone.
References Cited (Backward Citations)
No citation records indexed.
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