EP0144115A2
Expired / Lapsed
EP
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An ellipsometer
Assignee: Tohoku University
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Filing: 1984-06-07
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Granted: —
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Expires: 2004-06-07
Abstract
Abstract Light from a light source is applied to a specimen after polarization, and the emergent light from the specimen is measured by an analyzer and a detector, the light to be measured passing through a spectroscope disposed in the optical path between the light source and the detector.
Inventors
- 👤 Masaki Yamamoto
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-06 21:11
CPC Classifications
G; G01; G01N; G01N21/00; G01N21/17; G01N21/21; G01N21/211
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
97 words
An ellipsometer, comprising a light source, a polarizer adapted to polarize light from the light source, a specimen holder adapted to hold a specimen in such a manner that polarized light from said polarizer becomes incident to the specimen, a combination of an analyzer and light detector disposed in the path of emergent light from said specimen in response to said incident light so as to measure the state of polarization of the emergent light, and a spectroscope disposed on an optical path of said incident and emergent light between said light source and said light detector.
Claim 2
Dependent Claim
97 words
An ellipsometer, comprising a light source, a polarizer adapted to polarize light from the light source, a specimen holder adapted to hold a specimen in such a manner that polarized light from said polarizer becomes incident to the specimen, a combination of an analyzer and light detector disposed in the path of emergent light from said specimen in response to said incident light so as to measure the state of polarization of the emergent light, and a spectroscope disposed on an optical path of said incident and emergent light between said light source and said light detector.
Claim 3
Dependent Claim
35 words
An ellipsometer as set forth in claim 1, wherein said light source produces white light or electromagnetic waves of a range covering ultraviolet rays, visual rays, infrared rays, and microwaves and/or is a xenon lamp.
Claim 4
Dependent Claim
27 words
An ellipsometer as set forth in claim 1 or 2, wherein said emergent light is reflected light from said specimen to be held by said specimen holder.
Claim 5
Dependent Claim
27 words
An ellipsometer as set forth in claim 1 or 2, wherein said emergent light is light transmitted through said specimen to be held by said specimen holder.
Claim 6
Dependent Claim
24 words
An ellipsometer as set forth in claim 1, 2, 3 or 4, wherein said spectroscope is disposed between said analyzer and said light detector.
Claim 7
Dependent Claim
15 words
An ellipsometer as set forth in any preceding claim, wherein said spectroscope is a spectrometer.
Claim 8
Dependent Claim
24 words
An ellipsometer as set forth in any preceding claim, wherein said ellipsometer further comprises a collimator disposed between said light source and said polarizer.
Claim 9
Dependent Claim
63 words
An ellipsometer as set forth in any preceding claim, including a phase compensator or compensators disposed on one or both of said optical paths between said polarizer and said specimen to be held by said specimen holder, and between said analyzer and said specimen to be held by said specimen holder, whereby said ellipsometer detects the state of polarization of non-linear polarized light.
Claim 10
Dependent Claim
36 words
An ellipsometer as set forth in any preceding claim, wherein said specimen is a thin film, in particular a thin film of magnesium fluoride, in particular a thin film of magnesium fluoride deposited on glass substrate.
Claim 11
Dependent Claim
23 words
An ellipsometer as set forth in any preceding claim, including a telescope disposed on the path of incident light to said light detector.
References Cited (Backward Citations)
No citation records indexed.
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