EP0150941A1
Expired / Lapsed
EP
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Charged-particle optical systems
Assignee: Dubilier PLC
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Filing: 1985-01-11
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Granted: —
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Expires: 2005-01-11
Abstract
Abstract A charged particle optical system for producing focused beams of both ions and electrons and comprising an electrostatic objective lens situated symmetrically about an axis 4 and with outer electrodes 1, 2 and an inner electrode 3. The lens electrode potentials and the energies of the respective particles entering the lens along the axis are adjusted in such a way as to focus both the ion and electron beams onto a common target plane.
Inventors
- 👤 John Richard Adrian Dept. of Engineering Cleaver
- 👤 Haroon Dept. of Engineering Ahmed
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-09 13:24
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/02; H01J37/04; H01J37/10; H01J37/12
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
79 words
A charged-particle optical system for the production of finely-focused beams of both electrons and ions, said system comprising a source of electrons, a source of ions and a single electrostatic objective lens comprising at least two electrodes arranged along an optical axis, the lens electrode potentials and the energies of the particles entering the lens being such as to cause the lens to focus both the ion and electron beams onto a common target plane coincident with the target.
Claim 2
Dependent Claim
79 words
A charged-particle optical system for the production of finely-focused beams of both electrons and ions, said system comprising a source of electrons, a source of ions and a single electrostatic objective lens comprising at least two electrodes arranged along an optical axis, the lens electrode potentials and the energies of the particles entering the lens being such as to cause the lens to focus both the ion and electron beams onto a common target plane coincident with the target.
Claim 3
Dependent Claim
68 words
An optical system as claimed in claim 1 wherein said objective lens has three or more electrodes spaced apart along the optical axis and wherein the outermost electrodes are at the same potential so that the particles emerge from the lens with the same energy as that which they possessed when they entered the lens, and the inner electrode or electrodes are at a higher or lower potential.
Claim 4
Dependent Claim
49 words
An optical system as claimed in claim 1 wherein said,objective lens has three or more electrodes spaced apart along the optical axis and wherein the outermost electrodes are at different potentials so that the particles are subjected to a net acceleration or deceleration as they pass through the lens.
Claim 5
Dependent Claim
22 words
An optical system as claimed in either one of claims 2 or 3 wherein the objective lens is a three-element einzel lens.
Claim 6
Dependent Claim
43 words
An optical system as claimed in any one of the preceding claims 1 further comprising a deflecting prism preceding the objective lens in the direction of motion of the particles and operable to combine the ion and electron beams from the respective sources.
Claim 7
Dependent Claim
59 words
An optical system as claimed in claim 5 wherein said deflecting prism comprises means for generating magnetic and/or electric fields through which the respective beams pass, and means for controlling said field or fields in such a way as to direct either the electron beam, or the ion beam, or both in sequence or simultaneously into the objective lens.
Claim 8
Dependent Claim
56 words
An optical system as claimed in either one of claims 5 or 6 wherein the axes of the beams emerging from the electron and ion sources are arranged to cross in the region of said deflecting prism which latter is operable to deflect the two beams onto said optical axis for passage through the objective lens.
Claim 9
Dependent Claim
36 words
An optical system as claimed in any one of the preceding claims wherein each source comprises an electron gun or ion gun as appropriate together with a separate optical column incorporating a condenser lens or lenses.
Claim 10
Dependent Claim
21 words
An optical system as claimed in claim 8 wherein each optical column incorporates elements for control of beam alignment and stigmation.
Claim 11
Dependent Claim
22 words
An optical system as claimed in either one of claims 8 or 9 wherein each optical column incorporates a respective aperture stop.
Claim 12
Dependent Claim
37 words
An optical system as claimed in any one of claims 8 to 10 wherein the separate components of each of the sources are composed principally of electric elements supplied from a common or interlinked electrical power supply.
Claim 13
Dependent Claim
44 words
An optical system as claimed in any one of claims 8 to 11 when dependent upon claim 7 wherein the separate optical columns are such as to bring their respective beams to a focus within or in the immediate vicinity of the deflecting prism.
Claim 14
Dependent Claim
29 words
13 An optical system as claimed in any one of the preceding claims further including scanning means for causing the beam impinging on the target to be scanned thereacross.
Claim 15
Dependent Claim
13 words
A charged-particle optical system as claimed in claim 1 substantially as hereinbefore described.
References Cited (Backward Citations)
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