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EP0239808A1 Expired / Lapsed EP ⏱️ 0.0 years remaining

Radiation detecting device

Assignee: Toshiba Corp
•
Filing: 1987-03-03
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Granted: —
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Expires: 2007-03-03
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Abstract

Abstract A solid state radiation detector (10) has semiconductor layers (14) and metal layers (16, 18) which are stacked along the incident direction of radiation rays. Each metal layer (16, 18) is made of a specific metal material which receives radiation rays entering itself and produces free photoelectrons by interactions therewith. The photoelectrons are introduced into the semiconductor layer (14), and excite it, thereby producing electron-hole pairs therein. The metal layers (16, 18) serve not only as radiation detecting layers but also as electrodes for collecting the electron-hole pairs. Therefore, when the produced electron-hole pairs are derived from the metal layers (16,18), an electrical radiation detecting signal may be produced.

Inventors

  • 👤 Tamotsu Hatayama
  • 👤 Yujiro Naruse

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-11-03 01:16
CPC Classifications
H; H10; H10F; H10F30/00; H10F30/20; H10F30/29; H10F30/295; G; G01; G01T; G01T1/00; G01T1/16; G01T1/24; G01T1/28; G01T1/29; G01T1/2914; G01T1/2921; G01T1/2928

Claims Analysis

Total Claims: 21
Claim 1
Independent Claim 103 words
A solid state radiation detecting device (10, 30, D), characterized by comprising a semiconductive layer (14, 34, 74, 90, 98), and a metal layer formed (16, 18, 36, 38, 76, 100, 102) on said semiconductive layer, said metal layer (16, 18, 36, 38, 76, 100, 102) substantially vertically receiving radiation rays entering itself and producing energy particles based on interactions therewith, said energy particles being introduced into said semiconductive layer (14, 3 4 , 79, 90, 98) and exciting said semiconductive layer (14, 34, 74, 90, 98) so as to produce electron-hole pairs, based on which an electrical radiation detecting signal is obtained.
Claim 2
Dependent Claim 103 words
A solid state radiation detecting device (10, 30, D), characterized by comprising a semiconductive layer (14, 34, 74, 90, 98), and a metal layer formed (16, 18, 36, 38, 76, 100, 102) on said semiconductive layer, said metal layer (16, 18, 36, 38, 76, 100, 102) substantially vertically receiving radiation rays entering itself and producing energy particles based on interactions therewith, said energy particles being introduced into said semiconductive layer (14, 3 4 , 79, 90, 98) and exciting said semiconductive layer (14, 34, 74, 90, 98) so as to produce electron-hole pairs, based on which an electrical radiation detecting signal is obtained.
Claim 3
Dependent Claim 51 words
The device according to claim 1, characterized in that said metal layer (16, 18, 36, 38, 76, 100, 102) comprises a specific metal for producing energy particles by interactions between itself and the radiation rays incident thereon and collecting electron-hole pairs produced in said semiconductive layer (14, 34, 79, 90, 98).
Claim 4
Dependent Claim 32 words
The device according to claim 2, characterized in that said metal layer (16, 18, 36, 38, 76, 100, 102) has a thickness smaller than a range of the energy particles produced therein.
Claim 5
Dependent Claim 29 words
4 . The device according to claim 3, characterized in that said specific metal is selected from the group consisting of metals having atomic numbers of 30 or more.
Claim 6
Dependent Claim 32 words
The device according to claim 4, characterized in that said metal layer includes a Schottky junction metal layer (16, 36) forming a Schottky barrier between itself and said semiconductive layer (14, 34).
Claim 7
Dependent Claim 30 words
The device according to claim 4, characterized in that said metal layer includes an ohmic contact metal layer (18, 38) which is in ohmic-contact with said semiconductive layer (14, 34).
Claim 8
Dependent Claim 19 words
The device according to claim 4, characterized in that said semiconductive layer (14, 34) consists of an amorphous semiconductor.
Claim 9
Dependent Claim 21 words
The device according to claim 4, characterized in that said semiconductive layer comprises a semiconductor layer having a pn junction structure.
Claim 10
Dependent Claim 24 words
The device according to claim 4, characterized in that said semiconductive layer comprises a semiconductor layer having a pin junction structure (92, 94, 96).
Claim 11
Dependent Claim 122 words
A solid state radiation detecting device, characterized by comprising detecting cell portions which are stacked to substantially vertically receive incident radiation rays, and in that each of said detecting cell portions comprises: a plurality of semiconductor layers (14, 34, 74, 90, 98); and a plurality of metal layers (16, 18, 36, 38, 76, 100, 102), alternately provided between adjacent semiconductor layers so that two neighbouring metal layers sandwich said semiconductor layer, for receiving incident radiation rays to produce free energy particles by interactions therewith, which are introduced into said semiconductor layers (14, 34, 74, 90, 98) and excite them so as to produce electron-hole pairs therein, and for collecting the electron-hole pairs to obtain carriers for producing an electrical radiation detecting signal.
Claim 12
Dependent Claim 122 words
A solid state radiation detecting device, characterized by comprising detecting cell portions which are stacked to substantially vertically receive incident radiation rays, and in that each of said detecting cell portions comprises: a plurality of semiconductor layers (14, 34, 74, 90, 98); and a plurality of metal layers (16, 18, 36, 38, 76, 100, 102), alternately provided between adjacent semiconductor layers so that two neighbouring metal layers sandwich said semiconductor layer, for receiving incident radiation rays to produce free energy particles by interactions therewith, which are introduced into said semiconductor layers (14, 34, 74, 90, 98) and excite them so as to produce electron-hole pairs therein, and for collecting the electron-hole pairs to obtain carriers for producing an electrical radiation detecting signal.
Claim 13
Dependent Claim 49 words
The device according to claim 10, characterized in that said metal layers include: a first metal layer (16, 36) for forming a Schottky barrier between itself and said semiconductor layer (14, 34); and a second metal layer (18, 38) which is in ohmic-contact with said semiconductor layer (14, 34).
Claim 14
Dependent Claim 30 words
The device according to claim 11, characterized in that said first and second metal layers (16, 36? 18, 38) are alternately arranged between the adjacent semiconductor layers (14, 34). 1
Claim 15
Dependent Claim 64 words
The device according to claim 12, characterized in that when X-rays (20) enter said metal layers (16, 36? 18, 38), said first and second metal layers comprise metals having atomic numbers of 30 or more for producing as said energy particles photoelectrons therein mainly by a photoelectric absorption effect, and the thicknesses thereof are set to be smaller than an average range of photoelectrons.
Claim 16
Dependent Claim 25 words
The device according to claim 13, characterized in that said first and second metal layers (36, 38) are electrically connected in series with each other.
Claim 17
Dependent Claim 25 words
The device according to claim 13, characterized in that said first and second metal layers (16, 18) are electrically connected in parallel with each other.
Claim 18
Independent Claim 229 words
A device for'sensing a radiation image comprising a substrate (50), and pixel sensors (D) which are two-dimensinally arranged on said substrate (50) to define rows and columns, characterized in that said sensors (D) comprise solid state radiation detectors each of which has semiconductor layers (74, 90, 98) and metal layers (76, 100, 102) which are stacked along the incident direction of the incident radiation image, said metal layers (76, 100, 102) being alternately arranged between the adjacent semiconductor layers, so that two neighbouring metal layers sandwich the corresponding semiconductor layer therebetween and equivalently constitute a capacitor, and said metal layers (76, 100, 102) selectively receiving the incident radiation image so as to produce free energy particles by interactions therewith, which are introduced into said semiconductor layers (74, 90, 98) and excite them so as to produce electron-hole pairs and that said device comprises: image signal readout means (52, 54, 62, 64, 66, 68) connected to said rows and columns of said radiation detectors (D), for precharging said radiation detectors (D) so as to initially accumulate charges thereon, and for reading out the charges which remain after recombination of the charges and the electron-hole pairs produced in said semiconductor layers (74, 90, 98) of each pixel sensor (Dij), and are collected by said metal layers (76, 100, 102), thereby obtaining an electrical image signal corresponding to the incident radiation image.
Claim 19
Independent Claim 229 words
A device for'sensing a radiation image comprising a substrate (50), and pixel sensors (D) which are two-dimensinally arranged on said substrate (50) to define rows and columns, characterized in that said sensors (D) comprise solid state radiation detectors each of which has semiconductor layers (74, 90, 98) and metal layers (76, 100, 102) which are stacked along the incident direction of the incident radiation image, said metal layers (76, 100, 102) being alternately arranged between the adjacent semiconductor layers, so that two neighbouring metal layers sandwich the corresponding semiconductor layer therebetween and equivalently constitute a capacitor, and said metal layers (76, 100, 102) selectively receiving the incident radiation image so as to produce free energy particles by interactions therewith, which are introduced into said semiconductor layers (74, 90, 98) and excite them so as to produce electron-hole pairs and that said device comprises: image signal readout means (52, 54, 62, 64, 66, 68) connected to said rows and columns of said radiation detectors (D), for precharging said radiation detectors (D) so as to initially accumulate charges thereon, and for reading out the charges which remain after recombination of the charges and the electron-hole pairs produced in said semiconductor layers (74, 90, 98) of each pixel sensor (Dij), and are collected by said metal layers (76, 100, 102), thereby obtaining an electrical image signal corresponding to the incident radiation image.
Claim 20
Dependent Claim 17 words
The device according to claim 16, characterized in that said semiconductor layers (74, 98) comprise amorphous silicon.
Claim 21
Dependent Claim 59 words
The device according to claim 17, characterized in that when X-rays enter said metal layers (76, 100, 102), said metal layers comprise metals having atomic numbers of 30 or more for producing as said energy particles photoelectrons therein mainly by a photoelectric absorption effect, and the thicknesses thereof are set to be smaller than an average range of photoelectrons.

References Cited (Backward Citations)

GB1018402A Cited
US4210805A Cited

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