Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
103 words
A solid state radiation detecting device (10, 30, D), characterized by comprising a semiconductive layer (14, 34, 74, 90, 98), and a metal layer formed (16, 18, 36, 38, 76, 100, 102) on said semiconductive layer, said metal layer (16, 18, 36, 38, 76, 100, 102) substantially vertically receiving radiation rays entering itself and producing energy particles based on interactions therewith, said energy particles being introduced into said semiconductive layer (14, 3 4 , 79, 90, 98) and exciting said semiconductive layer (14, 34, 74, 90, 98) so as to produce electron-hole pairs, based on which an electrical radiation detecting signal is obtained.
Claim 2
Dependent Claim
103 words
A solid state radiation detecting device (10, 30, D), characterized by comprising a semiconductive layer (14, 34, 74, 90, 98), and a metal layer formed (16, 18, 36, 38, 76, 100, 102) on said semiconductive layer, said metal layer (16, 18, 36, 38, 76, 100, 102) substantially vertically receiving radiation rays entering itself and producing energy particles based on interactions therewith, said energy particles being introduced into said semiconductive layer (14, 3 4 , 79, 90, 98) and exciting said semiconductive layer (14, 34, 74, 90, 98) so as to produce electron-hole pairs, based on which an electrical radiation detecting signal is obtained.
Claim 3
Dependent Claim
51 words
The device according to claim 1, characterized in that said metal layer (16, 18, 36, 38, 76, 100, 102) comprises a specific metal for producing energy particles by interactions between itself and the radiation rays incident thereon and collecting electron-hole pairs produced in said semiconductive layer (14, 34, 79, 90, 98).
Claim 4
Dependent Claim
32 words
The device according to claim 2, characterized in that said metal layer (16, 18, 36, 38, 76, 100, 102) has a thickness smaller than a range of the energy particles produced therein.
Claim 5
Dependent Claim
29 words
4 . The device according to claim 3, characterized in that said specific metal is selected from the group consisting of metals having atomic numbers of 30 or more.
Claim 6
Dependent Claim
32 words
The device according to claim 4, characterized in that said metal layer includes a Schottky junction metal layer (16, 36) forming a Schottky barrier between itself and said semiconductive layer (14, 34).
Claim 7
Dependent Claim
30 words
The device according to claim 4, characterized in that said metal layer includes an ohmic contact metal layer (18, 38) which is in ohmic-contact with said semiconductive layer (14, 34).
Claim 8
Dependent Claim
19 words
The device according to claim 4, characterized in that said semiconductive layer (14, 34) consists of an amorphous semiconductor.
Claim 9
Dependent Claim
21 words
The device according to claim 4, characterized in that said semiconductive layer comprises a semiconductor layer having a pn junction structure.
Claim 10
Dependent Claim
24 words
The device according to claim 4, characterized in that said semiconductive layer comprises a semiconductor layer having a pin junction structure (92, 94, 96).
Claim 11
Dependent Claim
122 words
A solid state radiation detecting device, characterized by comprising detecting cell portions which are stacked to substantially vertically receive incident radiation rays, and in that each of said detecting cell portions comprises: a plurality of semiconductor layers (14, 34, 74, 90, 98); and a plurality of metal layers (16, 18, 36, 38, 76, 100, 102), alternately provided between adjacent semiconductor layers so that two neighbouring metal layers sandwich said semiconductor layer, for receiving incident radiation rays to produce free energy particles by interactions therewith, which are introduced into said semiconductor layers (14, 34, 74, 90, 98) and excite them so as to produce electron-hole pairs therein, and for collecting the electron-hole pairs to obtain carriers for producing an electrical radiation detecting signal.
Claim 12
Dependent Claim
122 words
A solid state radiation detecting device, characterized by comprising detecting cell portions which are stacked to substantially vertically receive incident radiation rays, and in that each of said detecting cell portions comprises: a plurality of semiconductor layers (14, 34, 74, 90, 98); and a plurality of metal layers (16, 18, 36, 38, 76, 100, 102), alternately provided between adjacent semiconductor layers so that two neighbouring metal layers sandwich said semiconductor layer, for receiving incident radiation rays to produce free energy particles by interactions therewith, which are introduced into said semiconductor layers (14, 34, 74, 90, 98) and excite them so as to produce electron-hole pairs therein, and for collecting the electron-hole pairs to obtain carriers for producing an electrical radiation detecting signal.
Claim 13
Dependent Claim
49 words
The device according to claim 10, characterized in that said metal layers include: a first metal layer (16, 36) for forming a Schottky barrier between itself and said semiconductor layer (14, 34); and a second metal layer (18, 38) which is in ohmic-contact with said semiconductor layer (14, 34).
Claim 14
Dependent Claim
30 words
The device according to claim 11, characterized in that said first and second metal layers (16, 36? 18, 38) are alternately arranged between the adjacent semiconductor layers (14, 34). 1
Claim 15
Dependent Claim
64 words
The device according to claim 12, characterized in that when X-rays (20) enter said metal layers (16, 36? 18, 38), said first and second metal layers comprise metals having atomic numbers of 30 or more for producing as said energy particles photoelectrons therein mainly by a photoelectric absorption effect, and the thicknesses thereof are set to be smaller than an average range of photoelectrons.
Claim 16
Dependent Claim
25 words
The device according to claim 13, characterized in that said first and second metal layers (36, 38) are electrically connected in series with each other.
Claim 17
Dependent Claim
25 words
The device according to claim 13, characterized in that said first and second metal layers (16, 18) are electrically connected in parallel with each other.
Claim 18
Independent Claim
229 words
A device for'sensing a radiation image comprising a substrate (50), and pixel sensors (D) which are two-dimensinally arranged on said substrate (50) to define rows and columns, characterized in that said sensors (D) comprise solid state radiation detectors each of which has semiconductor layers (74, 90, 98) and metal layers (76, 100, 102) which are stacked along the incident direction of the incident radiation image, said metal layers (76, 100, 102) being alternately arranged between the adjacent semiconductor layers, so that two neighbouring metal layers sandwich the corresponding semiconductor layer therebetween and equivalently constitute a capacitor, and said metal layers (76, 100, 102) selectively receiving the incident radiation image so as to produce free energy particles by interactions therewith, which are introduced into said semiconductor layers (74, 90, 98) and excite them so as to produce electron-hole pairs and that said device comprises: image signal readout means (52, 54, 62, 64, 66, 68) connected to said rows and columns of said radiation detectors (D), for precharging said radiation detectors (D) so as to initially accumulate charges thereon, and for reading out the charges which remain after recombination of the charges and the electron-hole pairs produced in said semiconductor layers (74, 90, 98) of each pixel sensor (Dij), and are collected by said metal layers (76, 100, 102), thereby obtaining an electrical image signal corresponding to the incident radiation image.
Claim 19
Independent Claim
229 words
A device for'sensing a radiation image comprising a substrate (50), and pixel sensors (D) which are two-dimensinally arranged on said substrate (50) to define rows and columns, characterized in that said sensors (D) comprise solid state radiation detectors each of which has semiconductor layers (74, 90, 98) and metal layers (76, 100, 102) which are stacked along the incident direction of the incident radiation image, said metal layers (76, 100, 102) being alternately arranged between the adjacent semiconductor layers, so that two neighbouring metal layers sandwich the corresponding semiconductor layer therebetween and equivalently constitute a capacitor, and said metal layers (76, 100, 102) selectively receiving the incident radiation image so as to produce free energy particles by interactions therewith, which are introduced into said semiconductor layers (74, 90, 98) and excite them so as to produce electron-hole pairs and that said device comprises: image signal readout means (52, 54, 62, 64, 66, 68) connected to said rows and columns of said radiation detectors (D), for precharging said radiation detectors (D) so as to initially accumulate charges thereon, and for reading out the charges which remain after recombination of the charges and the electron-hole pairs produced in said semiconductor layers (74, 90, 98) of each pixel sensor (Dij), and are collected by said metal layers (76, 100, 102), thereby obtaining an electrical image signal corresponding to the incident radiation image.
Claim 20
Dependent Claim
17 words
The device according to claim 16, characterized in that said semiconductor layers (74, 98) comprise amorphous silicon.
Claim 21
Dependent Claim
59 words
The device according to claim 17, characterized in that when X-rays enter said metal layers (76, 100, 102), said metal layers comprise metals having atomic numbers of 30 or more for producing as said energy particles photoelectrons therein mainly by a photoelectric absorption effect, and the thicknesses thereof are set to be smaller than an average range of photoelectrons.