Patent US599744A successfully refreshed from Google Patents.
EP0243858A2
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Method and means for co-sintering ceramic/metal MLC substrates
Assignee: International Business Machines Corp
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Filing: 1987-04-22
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Granted: —
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Expires: 2007-04-22
Abstract
Abstract A method for co-sintering ceramic/metal multilayered ceramic substrates (15) wherein X-Y shrinkage is controlled and X-Y distortion and Z-direction camber are substantially eliminated. Binder-burnoff is substantially not aggravated during this process as well. The process is accomplished by applying selective forces (12, 19) to the surfaces of the ceramic substrates to control lateral movement while allowing Z-direction shrinkage movement. Frictional force means, pneumatic force means and weights are among the means used to supply forces. Cerium oxide is used in certain embodiments to enhance binder-burnoff.
Inventors
- 👤 Philip Lee Flaitz
- 👤 Arlyne Marie Flanagan
- 👤 Joseph Matthew Harvilchuck
- 👤 Lester Wynn Herron
- 👤 John Ulrich Knickerbocker
- 👤 Robert Wolff Nufer
- 👤 Charles Hampton Perry
- 👤 Srinivasa N. Reddy
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-31 08:12
CPC Classifications
C; C04; C04B; C04B35/00; C04B35/622; C04B35/64; C04B35/626; C04B35/63; C04B35/638; H; H10; H10W; H10W99/00
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
74 words
A method for forming a sintered ceramic structure exhibiting controlled shrinkage distortion or camber, characterized in that it comprises : - providing a green ceramic structure ; - applying a uniform restraining force to the surface of said green ceramic structure during the sintering cycle ; - firing said structure while it is subjected to said force to achieve the desired degree of shrinkage in the X-Y directions and to eliminate distortion and camber.
Claim 2
Independent Claim
74 words
A method for forming a sintered ceramic structure exhibiting controlled shrinkage distortion or camber, characterized in that it comprises : - providing a green ceramic structure ; - applying a uniform restraining force to the surface of said green ceramic structure during the sintering cycle ; - firing said structure while it is subjected to said force to achieve the desired degree of shrinkage in the X-Y directions and to eliminate distortion and camber.
Claim 3
Dependent Claim
37 words
The method of Claim 1 wherein said restraining force is chosen to be sufficient to prohibit X-Y distortion, camber and shrinkage, during densification in the Z-direction, but not sufficient to cause a total expansion of the substrate.
Claim 4
Dependent Claim
44 words
The method of Claim 2 wherein said uniform restraining force is applied by applying a peripheral Z-direction force ; said peripheral Z directional force being applied to at least one surface of said structure ; and overcoming the cohesive forces in the X-Y plane.
Claim 5
Dependent Claim
41 words
The method of Claim 3 wherein said uniform restraining force is applied by applying a coextensive Z force over at least the entire upper surfaces of said structure ; said Z directional force overcoming the cohesive forces in the X-Y plane.
Claim 6
Dependent Claim
40 words
The method of Claim 4 wherein said coextensive Z force is applied by applying an airbearing force ; said air-bearing force being applied to at least one surface of said structure, and overcoming the cohesive forces in the X-Y plane.
Claim 7
Dependent Claim
40 words
The method of Claim 5 wherein said uniform restraining force is applied by applying a frictional force ; said frictional force being applied to at least one surface of said structure, and overcoming the cohesive forces in the X-Y plane.
Claim 8
Dependent Claim
43 words
The method of Claim 4 or 5 or 6 further comprising ; providing doped cerium oxide on substantially all surfaces in contact with said ceramic and the ambient ; thereby allowing oxygen from the ambient to contact said ceramic structure, enhancing binder burnoff.
Claim 9
Independent Claim
95 words
A method for forming a cured ceramic element exhibiting substantially no X-Y shrinkage, distortion or camber characterized in that it includes : providing a setter tile which is unaffected by firing temperatures ; providing a laminated green sheet structure having a conductor pattern extending therebetween, on said setter tile ; clamping all of the circumscribing peripheral portions of the upper surface of said structure against lateral movement in the plane perpendicular thereto ; and firing said structure, as clamped, to a temperature and for a time sufficient to cure said structure into said ceramic element.
Claim 10
Independent Claim
95 words
A method for forming a cured ceramic element exhibiting substantially no X-Y shrinkage, distortion or camber characterized in that it includes : providing a setter tile which is unaffected by firing temperatures ; providing a laminated green sheet structure having a conductor pattern extending therebetween, on said setter tile ; clamping all of the circumscribing peripheral portions of the upper surface of said structure against lateral movement in the plane perpendicular thereto ; and firing said structure, as clamped, to a temperature and for a time sufficient to cure said structure into said ceramic element.
Claim 11
Dependent Claim
31 words
The method of Claim 8 further comprising the step of : providing an oxidizing atmosphere to the surfaces of said structure during firing to effect elimination of by-products from said structure.
Claim 12
Dependent Claim
53 words
The method of Claim 9 wherein said green sheets comprise a dispersion of ceramic-forming particles in an organic binder, and wherein the outer surfaces of said green sheets, intermediate said peripheral portions thereof are provided for access to oxidizing atmospheres and venting of decomposition and oxidized products of said binder during said firing.
Claim 13
Dependent Claim
45 words
The method of Claim 12 wherein said ceramic element comprises a glass-ceramic and said ceramic-forming particles comprise crystallizable glass particles and said conductor pattern comprises copper-based metallurgy and said oxidizing atmosphere comprises hydrogen to H₂O ratio in the range of 10⁻⁴ to 10 -6.5 .
Claim 14
Dependent Claim
57 words
The method of Claim 8,9,10 or 11 wherein said clamping is achieved by : aligning weighted platens about the perimeter of the structure on the upper surface of said structure said platens being provided with protective undercoating and venting holes and said setter tile is provided with channels allowing by-products of the firing step to be removed.
References Cited (Backward Citations)
No citation records indexed.
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