EP0250064A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Wafer processing chuck using multiple thin clamps
Assignee: Varian Medical Systems Inc
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Filing: 1987-03-23
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Granted: —
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Expires: 2007-03-23
Abstract
Abstract A transport device is used to move a wafer into a processing chamber. Lifting pins receive the wafer and lower the wafer to the surface of the chuck. A multiplicity of thin clamping hooks swing over the edge of the wafer, centering the wafer and then clamp down on the edge of the wafer to hold the wafer firmly to the chuck. Grooves on the face of the chuck and internal channels in the chuck supply helium for thermal contact to the back of the wafer.
Inventors
- 👤 George L. Coad
- 👤 Frederick P. Layman
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-31 13:47
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/70; H10P72/76; H10P72/7604; H10P72/7606; H10P72/7612
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
148 words
A device for centering and clamping a disc-like workpiece, comprising: a platform having upper surface means for supporting the workpiece; a multiplicity of clamp means for centering and holding the workpiece on the platform, said clamp means being distributed around a perimeter of said platform, each said clamp means including a thin planar hook member and a spring member, each said thin planar hook member having an upper lip shaped to fit over the workpiece, a lower lip and a lifting slot; a lifting ring arranged around and below said upper surface means, said lifting slot of each said thin planar hook engaging said lifting ring; a spreading ring arranged around and below said upper surface means and above said lifting ring, said lower lip of each said thin planar hook engaging said spreading ring; means for moving said lifting ring; and means for moving said spreading ring.
Claim 2
Independent Claim
148 words
A device for centering and clamping a disc-like workpiece, comprising: a platform having upper surface means for supporting the workpiece; a multiplicity of clamp means for centering and holding the workpiece on the platform, said clamp means being distributed around a perimeter of said platform, each said clamp means including a thin planar hook member and a spring member, each said thin planar hook member having an upper lip shaped to fit over the workpiece, a lower lip and a lifting slot; a lifting ring arranged around and below said upper surface means, said lifting slot of each said thin planar hook engaging said lifting ring; a spreading ring arranged around and below said upper surface means and above said lifting ring, said lower lip of each said thin planar hook engaging said spreading ring; means for moving said lifting ring; and means for moving said spreading ring.
Claim 3
Dependent Claim
25 words
The device of claim 1 including lifting pin means for receiving a workpiece from a workpiece handling mechanism and lowering said workpiece to said platform.
Claim 4
Dependent Claim
21 words
The device of claim 2 including means for temperature control of said workpiece while said workpiece is held to said platform.
Claim 5
Dependent Claim
36 words
The device of claim 3 wherein said means for temperature control includes means for passing helium gas between said upper surface means of said platform and the back of the workpiece whereby to ensure thermal contact.
Claim 6
Dependent Claim
20 words
The device of claim 4 including means for removing said platform for servicing while leaving said clamp means in place.
References Cited (Backward Citations)
No citation records indexed.
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