Apparatus and method for transferring workpieces

Claim 2

In apparatus for processing a workpiece: a transfer mechanism for moving a workpiece from a first location to a second location, said mechanism comprising: a support; a transfer arm; means mounting the transfer arm on the support along a rectilinear path in opposed directions relative to the support and along an arcuate path in a plane; means on the support for moving the transfer arm along said rectilinear path; means on the support for rotating the transfer arm along said arcuate path; means on the arm for removably attaching a workpiece thereto; and means coupled with said moving, rotating and attaching means for sequentially controlling the actuation thereof.

Claim 3

In apparatus as set forth in claim 1, wherein is included means coupled with the arm for shifting the same along a second rectilinear path substantially perpendicular to the first-mentioned rectilinear path, said control means being coupled with said shifting means for sequentially actuating the same with said moving, rotating and attaching means.

Claim 4

In apparatus as set forth in claim 1, wherein said rectilinear path is generally horizontal.

Claim 5

In apparatus as set forth in claim 1, wherein said plane is generally horizontal.

Claim 6

In apparatus as set forth in claim 1, wherein said attaching means includes means defining a suction port at one end of the arm for removably coupling a workpiece to the arm by suction.

Claim 7

In apparatus as set forth-in claim 1, wherein said support includes a baseplate, said moving and rotating means being on one side of the baseplate and the arm being on the opposite side of the baseplate and means extending through the baseplate and shiftable relative thereto for coupling the arm and said moving, rotating and attaching means.

Claim 8

In apparatus as set forth in claim 1, wherein said control means operates to simultaneously actuate the moving, rotating and attaching means.

Claim 9

In apparatus as set forth in claim 1, wherein said moving means includes a lead screw journalled at the ends thereof on the support, said lead screw being parallel to said rectilinear path, a reversible motor coupled with the lead screw for rotating the same in opposed directions, and carriage means shiftably mounted on the support for coupling the arm to the lead screw.

Claim 10

In apparatus as set forth in claim 1, wherein said rotating means includes a reversible drive motor, a shaft coupled to one end of the arm, and means coupling the shaft to said drive motor to permit rotation, Q ;f the shaft in opposed directions relative to the support when the drive motor is actuated.

Claim 11

In apparatus for handling a plurality of semiconductor wafers comprising: a horizontal baseplate having a rectilinear slot therethrough; a carriage; . means shiftably mounting the carriage on the baseplate below the slot for movement along a horizontal path relative thereto; a post extending through the slot and having an upper end and a lower end; a vertical lead screw journalled on the carriage and movable therewith along said horizontal path; means coupling the post to the vertical lead screw for movement along a path; a first reversible drive motor coupled with the horizontal lead screw for rotating the same to cause movement of the post along said horizontal path, said post having a shaft rotatably mounted therein and extending longitudinally thereof, there being a wafer transfer arm coupled to the upper end of the shaft for rotation therewith relative to the post; a second reversible drive motor carried by the post near the lower end thereof for rotating the shaft relative to the post and thereby rotating the transfer arm in a generally horizontal plane, said arm having an outer end provided with a wafer engageable pad, said pad, said arm and shaft having a fluid passage therethrough, there being vacuum means coupled with said fluid passage for reducing the air pressure therewithin to cause a suction force at the pad to thereby permit removable attachment of a wafer to the pad; a horizontal screw journalled at its ends thereof on the baseplate on the lower surface thereof, there being means coupling the carriage to the horizontal lead screw for movement of the carriage in response to the rotation of the horizontal lead screw relative to the baseplate; a second drive motor coupled with the horizontal lead screw for rotating the same; and control means coupled with said drive motors and said vacuum means for actuating the same in accordance with a predetermined sequence.

Claim 12

In apparatus for handling a plurality of semiconductor wafers comprising: a horizontal baseplate having a rectilinear slot therethrough; a carriage; . means shiftably mounting the carriage on the baseplate below the slot for movement along a horizontal path relative thereto; a post extending through the slot and having an upper end and a lower end; a vertical lead screw journalled on the carriage and movable therewith along said horizontal path; means coupling the post to the vertical lead screw for movement along a path; a first reversible drive motor coupled with the horizontal lead screw for rotating the same to cause movement of the post along said horizontal path, said post having a shaft rotatably mounted therein and extending longitudinally thereof, there being a wafer transfer arm coupled to the upper end of the shaft for rotation therewith relative to the post; a second reversible drive motor carried by the post near the lower end thereof for rotating the shaft relative to the post and thereby rotating the transfer arm in a generally horizontal plane, said arm having an outer end provided with a wafer engageable pad, said pad, said arm and shaft having a fluid passage therethrough, there being vacuum means coupled with said fluid passage for reducing the air pressure therewithin to cause a suction force at the pad to thereby permit removable attachment of a wafer to the pad; a horizontal screw journalled at its ends thereof on the baseplate on the lower surface thereof, there being means coupling the carriage to the horizontal lead screw for movement of the carriage in response to the rotation of the horizontal lead screw relative to the baseplate; a second drive motor coupled with the horizontal lead screw for rotating the same; and control means coupled with said drive motors and said vacuum means for actuating the same in accordance with a predetermined sequence.