EP0265834A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Sensor and method of producing same
Assignee: Figaro Engineering Inc
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Filing: 1987-10-21
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Granted: —
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Expires: 2007-10-21
Abstract
Abstract A sensor comprising a metal heat generating member formed with a heat-resistant insulating coating of Al₂O₃ or the like over its surface, and an atmosphere-sensitive layer of SnO₂ or the like supported on the coating. The insulating coating is formed, for example, by alumina sol coating and thermal decomposition, or plasma CVD of an aluminum compound. The sensitive layer is formed, for example, by the thermal decomposition of an organic compound of tin, vacuum evaporation or sputtering of tin, or printing of SnO₂ on the heat generating member when the member is in the form of a flat plate. At least one electrode is connected to the sensitive layer for deriving an output from the layer in response to a combustible gas, humidity or the like.
Inventors
- 👤 Koda Hiroshi
- 👤 Shimabukuro Muneharu
- 👤 Ono Kiyonori
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-02 03:54
CPC Classifications
G; G01; G01N; G01N27/00; G01N27/02; G01N27/04; G01N27/12
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
41 words
A sensor comprising: a metal heat generating member having a heat-resistant insulating coating at least partially over its surface, an atmosphere-sensitive layer having at least one portion formed on the coating, and at least one electrode connected to the sensitive layer.
Claim 2
Dependent Claim
41 words
A sensor comprising: a metal heat generating member having a heat-resistant insulating coating at least partially over its surface, an atmosphere-sensitive layer having at least one portion formed on the coating, and at least one electrode connected to the sensitive layer.
Claim 3
Dependent Claim
43 words
A sensor as defined in claim 1 wherein the heat generating member is made of a base metal, and the sensitive layer is separated from the heat generating member by the insulating coating, at least two electrodes being connected to the sensitive layer.
Claim 4
Dependent Claim
63 words
A sensor as defined in claim 1 wherein the heat generating member is made of a noble metal and has a portion not covered with the insulating coating, and the sensitive layer extends over said portion in contact with the heat generating member to render the member usable as the electrode for the sensitive layer, the sensitive layer having another electrode connected thereto.
Claim 5
Dependent Claim
20 words
A sensor as defined in claim 2 wherein the heat generating member is partially provided with an electrically conductive coating.
Claim 6
Dependent Claim
51 words
A sensor as defined in claim 1 which comprises a heat-resistant insulating substrate provided with at least three external electrodes, the heat generat ing member being provided on the substrate, the heat generating member and the electroded connected to the sensitive layer being connected to said al least three external electrodes.
Claim 7
Independent Claim
48 words
A method of producing a sensor comprising the steps of: forming a heat-resistant insulating coating at least partially over the surface of a metal heat generating member, forming an atmosphere-sensitive layer at least partially over the coating, and providing at least one electrode connected to the sensitive layer.
Claim 8
Independent Claim
48 words
A method of producing a sensor comprising the steps of: forming a heat-resistant insulating coating at least partially over the surface of a metal heat generating member, forming an atmosphere-sensitive layer at least partially over the coating, and providing at least one electrode connected to the sensitive layer.
Claim 9
Dependent Claim
17 words
A method as defined in claim 6 wherein the electrode is provided after forming the sensitive layer.
Claim 10
Dependent Claim
22 words
A method as defined in claim 6 wherein the electrode is provided after forming the insulating coating before forming the sensitive layer.
Claim 11
Dependent Claim
16 words
A method as defined in claim 6 wherein the insulating coating is fromed by plasma CVD.
Claim 12
Dependent Claim
32 words
A method as defined in claim 6 wherein the insulating coating is formed by the thermal decomposition of a substance which is convertible into a heat-resistant insulating coating material by thermal decomposition.
Claim 13
Dependent Claim
66 words
A method as defined in claim 6 which comprises the steps of: providing a frame having a plurality of metal heat generating members attached thereto and formed with the insulating coating and the sensitive layer, positioning the frame relative to external leads, and connecting each of the generating members to the corresponding external leads after the positioning and thereafter separating the generating members from the frame.
Claim 14
Dependent Claim
33 words
A method as defined in claim 11 wherein the external leads are connected together into a lead frame, and the frame of the generating members is positioned on the lead frame in place.
References Cited (Backward Citations)
No citation records indexed.
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