EP0283149A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
A radiation gauge
Assignee: Canon Inc
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Filing: 1988-02-25
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Granted: —
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Expires: 2008-02-25
Abstract
Abstract A radiation gauge (2) for detecting an intensity of X-ray radiation is provided for example an X-ray aligner. The sensitivity of the radiation gauge (2) is influenced by the past exposure. The sensitivity change is compensated by a calibrator (3) which responds to an integrator which produces a measure of past-exposure. Thus, the correct exposure can be provided. The sensitivity of the gauge (2) may be influenced by past non-exposure time and/or elapsed time. Modifications of the gauge compensate for these influences also.
Inventors
- 👤 Tsuneaki Kadosawa
- 👤 Nobushige Korenaga
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-07 20:13
CPC Classifications
H; H05; H05G; H05G1/00; H05G1/08; H05G1/26; G; G01; G01T; G01T1/00; G01T1/29; G03; G03F; G03F7/00; G03F7/70; G03F7/70483; G03F7/7055; G03F7/70558
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
60 words
A radiation detector, comprising: means for detecting radiation intensity; a calibrator for calibrating the intensity of the radiation detection by said detecting means; and an integrator for integrating an amount of exposure corresponding to the calibrated intensity, wherein said calibrator calibrates the intensity detected by said detecting means in accordance with an integrated amount of exposure provided by said integrator.
Claim 2
Dependent Claim
60 words
A radiation detector, comprising: means for detecting radiation intensity; a calibrator for calibrating the intensity of the radiation detection by said detecting means; and an integrator for integrating an amount of exposure corresponding to the calibrated intensity, wherein said calibrator calibrates the intensity detected by said detecting means in accordance with an integrated amount of exposure provided by said integrator.
Claim 3
Dependent Claim
92 words
An exposure apparatus for exposing a substrate coated with a resist to a pattern of a mask by radiation, comprising: means for detecting radiation intensity; a calibrator for calibrating the intensity of the radiation detection by said detecting means; an integrator for integrating an amount of exposure corresponding to the calibrated intensity, wherein said calibrator calibrates the intensity detected by said detecting means in accordance with an integrated amount of exposure provided by said integrator; and control means for controlling amount of exposure of the substrate in accordance with the calibrated intensity.
Claim 4
Dependent Claim
92 words
An exposure apparatus for exposing a substrate coated with a resist to a pattern of a mask by radiation, comprising: means for detecting radiation intensity; a calibrator for calibrating the intensity of the radiation detection by said detecting means; an integrator for integrating an amount of exposure corresponding to the calibrated intensity, wherein said calibrator calibrates the intensity detected by said detecting means in accordance with an integrated amount of exposure provided by said integrator; and control means for controlling amount of exposure of the substrate in accordance with the calibrated intensity.
Claim 5
Dependent Claim
30 words
An apparatus according to Claim 2, wherein said control means controls a speed of movement of a stage carrying the substrate to control the amount of exposure of the substrate.
Claim 6
Dependent Claim
17 words
An apparatus according to Claim 2, wherein said control means controls an open period of a shutter.
Claim 7
Dependent Claim
111 words
A radiation detector, comprising: means for detecting radiation intensity; a calibrator for calibrating the intensity of the radiation detection by said detecting means; an integrator for integrating an amount of exposure corresponding to the calibrated intensity, wherein said calibrator calibrates the intensity detected by said detecting means in accordance with an integrated amount of exposure provided by said integrator; a discriminator for discriminating whether said detecting means is being exposed to the radiation or not; a timer responsive to said discriminating means to count a non-exposure period; and a subtracter for subtracting the integrated amount of exposure provided by said integrator in accordance with the non-exposure period provided by said timer.
Claim 8
Dependent Claim
111 words
A radiation detector, comprising: means for detecting radiation intensity; a calibrator for calibrating the intensity of the radiation detection by said detecting means; an integrator for integrating an amount of exposure corresponding to the calibrated intensity, wherein said calibrator calibrates the intensity detected by said detecting means in accordance with an integrated amount of exposure provided by said integrator; a discriminator for discriminating whether said detecting means is being exposed to the radiation or not; a timer responsive to said discriminating means to count a non-exposure period; and a subtracter for subtracting the integrated amount of exposure provided by said integrator in accordance with the non-exposure period provided by said timer.
Claim 9
Dependent Claim
56 words
A radiation detector, comprising: detecting means for detecting an intensity of a radiation; a timer operative in response to exposure of said detecting means to the radiation; and a calibrator for calibrating an output of said detecting means in accordance with an output of said timer and a sensitivity change of said detecting means with time.
Claim 10
Dependent Claim
56 words
A radiation detector, comprising: detecting means for detecting an intensity of a radiation; a timer operative in response to exposure of said detecting means to the radiation; and a calibrator for calibrating an output of said detecting means in accordance with an output of said timer and a sensitivity change of said detecting means with time.
Claim 11
Dependent Claim
73 words
A radiation detection apparatus, comprising: a radiation detector for producing a signal representing the intensity of radiation detected thereby, the relationship between the signal and the said intensity being dependent on the amount of radiation by the detector, means for determining the said amount, and means responsive to the detector and to the determining means for compensating the said signal for variations therein due to the amount of radiation detected by the detector.
Claim 12
Dependent Claim
73 words
A radiation detection apparatus, comprising: a radiation detector for producing a signal representing the intensity of radiation detected thereby, the relationship between the signal and the said intensity being dependent on the amount of radiation by the detector, means for determining the said amount, and means responsive to the detector and to the determining means for compensating the said signal for variations therein due to the amount of radiation detected by the detector.
References Cited (Backward Citations)
No citation records indexed.
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