EP0299779A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Fast response time microsensors for gaseous and vaporous species
Assignee: SRI International Inc
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Filing: 1988-07-15
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Granted: —
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Expires: 2008-07-15
Abstract
Abstract The present invention relates to a sensor for gaseous and vaporous species. The sensor (10) comprises a substrate (12) having a surface (14) having an opening therein. A gas and vapor permeable sensing electrode (20) having front and back sides is located across the opening with the front side facing generally the same direction as does the surface. A gas flow path (18) leads to the back side of the sensing electrode (20). An electrolytic medium (26) is in contact with the front side of the electrode. An additional electrode (24) is in contact with the electrolytic medium and is electronically isolated from the sensing electrode other than via the electrolytic medium. A gas sensor as described has a very fast response time and an extended lifetime and can be made selective for any of a number of different gaseous species.
Inventors
- 👤 Mark J Madou
- 👤 Takaaki Otagawa
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-29 22:17
CPC Classifications
G; G01; G01N; G01N27/00; G01N27/26; G01N27/403; G01N27/404; G01N27/4045
Claims Analysis
Total Claims: 27
Claim 1
Independent Claim
79 words
A sensor for gaseous and vaporous species, comprising: a substrate having first and second surfaces facing generally away from one another and having a passage therethrough from the first surface to the second surface; a gas permeable sensing electrode positioned across said passage; an electrolytic medium in contact with said first surface and with said electrode; and an additional electrode in contact with said electrolytic medium and electrically isolated from said sensing electrode other than via said electrolytic medium.
Claim 2
Dependent Claim
79 words
A sensor for gaseous and vaporous species, comprising: a substrate having first and second surfaces facing generally away from one another and having a passage therethrough from the first surface to the second surface; a gas permeable sensing electrode positioned across said passage; an electrolytic medium in contact with said first surface and with said electrode; and an additional electrode in contact with said electrolytic medium and electrically isolated from said sensing electrode other than via said electrolytic medium.
Claim 3
Dependent Claim
20 words
A sensor as set forth in claim 1, further including: a porous member in said passage adjacent said sensing electrode.
Claim 4
Dependent Claim
15 words
A sensor as set forth in claim 2, wherein said porous member comprises porous silicon.
Claim 5
Dependent Claim
20 words
A sensor as set forth in claim 3, wherein said porous silicon includes a hydrophobic coating in the pores thereof.
Claim 6
Dependent Claim
21 words
A sensor as set forth in claim 1, further including: an aqueous liquid containing reservoir in communication with said electrolytic medium.
Claim 7
Dependent Claim
20 words
A sensor as set forth in claim 1, further including: means for encapsulating said electrolytic medium and said sensing electrode.
Claim 8
Dependent Claim
35 words
A sensor as set forth in claim 1, wherein said substrate comprises a semiconductor material and further including a dielectric layer between said substrate and said sensing electrode, said additional electrode and said electrolytic medium.
Claim 9
Dependent Claim
16 words
A sensor as set forth in claim 1, wherein said additional electrode comprises a counter electrode.
Claim 10
Dependent Claim
19 words
A sensor as set forth in claim 8, wherein said counter electrode is positioned closely adjacent said sensing electrode.
Claim 11
Dependent Claim
34 words
A sensor as set forth in claim 8, further including: a reference electrode in contact with said electrolytic medium and electrically isolated from said sensing and counter electrodes other than via said electrolytic medium.
Claim 12
Dependent Claim
17 words
A sensor as set forth in claim 10, wherein said electrolytic medium comprises a solid polymer electrolyte.
Claim 13
Dependent Claim
22 words
A sensor as set forth in claim 11, further including: an aqueous liquid containing reservoir in communication with said solid polymer electrolyte.
Claim 14
Dependent Claim
15 words
A sensor as set forth in claim 10, wherein said electrolytic medium comprises a hydrogel.
Claim 15
Dependent Claim
20 words
A sensor as set forth in claim 13, further including: an aqueous liquid containing reservoir in communication with said hydrogel.
Claim 16
Dependent Claim
88 words
A sensor for gaseous and vaporous species, comprising: a substrate having a surface having an opening therein; a gas and vapor permeable sensing electrode having front and back sides is located across said opening with said front side facing generally the same direction as does said surface; a gas flow path leading to said back side; an electrolytic medium in contact with said front side; and an additional electrode in contact with said electrolytic medium and electronically isolated from said sensing electrode other than via said electrolytic medium.
Claim 17
Dependent Claim
88 words
A sensor for gaseous and vaporous species, comprising: a substrate having a surface having an opening therein; a gas and vapor permeable sensing electrode having front and back sides is located across said opening with said front side facing generally the same direction as does said surface; a gas flow path leading to said back side; an electrolytic medium in contact with said front side; and an additional electrode in contact with said electrolytic medium and electronically isolated from said sensing electrode other than via said electrolytic medium.
Claim 18
Dependent Claim
21 words
A sensor as set forth in claim 15, further including: an aqueous liquid containing reservoir in communication with said electrolytic medium.
Claim 19
Dependent Claim
20 words
A sensor as set forth in claim 15, further including: means for encapsulating said electrolytic medium and said sensing electrode.
Claim 20
Dependent Claim
17 words
A sensor as set forth in claim 15, wherein said electrolytic medium comprises a solid polymer electrolyte.
Claim 21
Dependent Claim
22 words
A sensor as set forth in claim 18, further including: an aqueous liquid containing reservoir in communication with said solid polymer electrolyte.
Claim 22
Dependent Claim
15 words
A sensor as set forth in claim 15, wherein said electrolytic medium comprises a hydrogel.
Claim 23
Dependent Claim
101 words
A sensor for gaseous and vapor species, comprising: a gas and vapor permeable substrate having a surface; means for making selected portions of said surface gas and vapor impermeable while leaving an area thereof which remains gas and water permeable; a gas and vapor permeable sensing electrode having front and back sides located across said area with said front side facing generally the same direction as does said surface; an electrolytic medium in contact with said front side; and an additional electrode in contact with said electrolytic medium and electronically isolated from said sensing electrode other than via said electrolytic medium.
Claim 24
Dependent Claim
101 words
A sensor for gaseous and vapor species, comprising: a gas and vapor permeable substrate having a surface; means for making selected portions of said surface gas and vapor impermeable while leaving an area thereof which remains gas and water permeable; a gas and vapor permeable sensing electrode having front and back sides located across said area with said front side facing generally the same direction as does said surface; an electrolytic medium in contact with said front side; and an additional electrode in contact with said electrolytic medium and electronically isolated from said sensing electrode other than via said electrolytic medium.
Claim 25
Dependent Claim
21 words
A sensor as set forth in claim 21, further including: an aqueous liquid containing reservoir in communication with said electrolytic medium.
Claim 26
Dependent Claim
20 words
A sensor as set forth in claim 21, further including: means for encapsulating said electrolytic medium and said sensing electrode.
Claim 27
Dependent Claim
17 words
A sensor as set forth in claim 21, wherein said electrolytic medium comprises a solid polymer electrolyte.
References Cited (Backward Citations)
No citation records indexed.
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