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EP0312924A2 Expired / Lapsed EP ⏱️ 0.0 years remaining

Vacuum chucking tool and system

Assignee: Fujitsu Ltd
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Filing: 1988-10-14
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Granted: —
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Expires: 2008-10-14
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Abstract

Abstract A vacuum chuck (9) which can be operated both in gas and in liquid is provided with a liquid-gas separating membrane (8) having a plurality of tiny holes which allow passage of gas molecules but do not pass liquid. The liquid-gas separating membrane (8) is spanned between an inlet hole (3, 5) of the chuck and a manifold (4) which, in operation of the chuck, is connected to a pneumatic system (129). The pneumatic system (129) comprises an aspirator (10), a compressor (11) and a switching valve (12). The vacuum chuck (9) is immersed into a liquid (13), compressed gas purges the liquid in the inlet hole (3), then the switching valve (12) is switched to the aspirator (10). So, an object such as a semiconductor wafer (7) is sucked quickly to the chuck (9), and the inlet hole (3, 5) is closed by the object (7). If a small quantity of liquid intrudes into the chuck (9), it cannot pass through the liquid-gas separating membrane (8), and operation of the chuck (9) is not harmed.

Inventors

  • 👤 Tsutomu C/O Fujitsu Limited Ogawa

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-11-02 11:31
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0402; B; B65; B65G; B65G47/00; B65G47/74; B65G47/90; B65G47/91; B65G47/911; H10P72/0451; H10P72/0462; H10P72/70; H10P72/76; H10P72/78; Y; Y10; Y10T; Y10T279/00; Y10T279/11

Claims Analysis

Total Claims: 8
Claim 1
Independent Claim 139 words
A vacuum chucking tool comprising a vacuum chuck capable of being evacuated or pressurized when connected to a pneumatic system, for clamping or releasing an object to or from the vacuum chuck, the vacuum chuck having:- a head for holding the object; a cavity formed in the head; an inlet formed in the head for sucking the object towards the head, the inlet being connected to the cavity; a holder for supporting the head; a connection means provided on the holder for connecting the chuck to the pneumatic system; a manifold formed in the holder, for connecting the cavity to the connection means; and a liquid-gas separating membrane for separating gas from liquid in a mixture of liquid and gas, the liquid-gas separating membrane being spanned between the cavity and the manifold, or between the cavity and the inlet.
Claim 2
Dependent Claim 139 words
A vacuum chucking tool comprising a vacuum chuck capable of being evacuated or pressurized when connected to a pneumatic system, for clamping or releasing an object to or from the vacuum chuck, the vacuum chuck having:- a head for holding the object; a cavity formed in the head; an inlet formed in the head for sucking the object towards the head, the inlet being connected to the cavity; a holder for supporting the head; a connection means provided on the holder for connecting the chuck to the pneumatic system; a manifold formed in the holder, for connecting the cavity to the connection means; and a liquid-gas separating membrane for separating gas from liquid in a mixture of liquid and gas, the liquid-gas separating membrane being spanned between the cavity and the manifold, or between the cavity and the inlet.
Claim 3
Dependent Claim 34 words
A vacuum chucking tool as claimed in claim 1, the vacuum chucking tool comprising a plurality of vacuum chucks as set forth in claim 1, the chucks being arranged in parallel to each other.
Claim 4
Dependent Claim 40 words
A vacuum chucking tool as claimed in claim 1 or 2, wherein the liquid-gas separating membrane in the or each vacuum chuck comprises a membrane having a plurality of tiny holes through which gas molecules may pass but not liquid.
Claim 5
Dependent Claim 33 words
A vacuum chucking tool as claimed in claim 1, 2 or 3, wherein the inlet of the or each vacuum chuck is formed in a bottom surface of the head of the chuck.
Claim 6
Dependent Claim 33 words
A vacuum chucking tool as claimed in claim 1, 2 or 3, wherein the inlet of the or each vacuum chuck is formed in a side wall of the head of the chuck.
Claim 7
Dependent Claim 41 words
A vacuum chucking system, comprising a vacuum chucking tool as claimed in any preceding claim and a pneumatic system operable to evacuate or pressurize the or each vacuum chuck, for clamping or releasing an object to or from the vacuum chuck.
Claim 8
Dependent Claim 72 words
A vacuum chucking system as claimed in claim 6, wherein the pneumatic system comprises:- an aspirator for evacuating the or each vacuum chuck; a compressed gas means for sending compressed gas to the or each vacuum chuck; and a switching valve connected between the vacuum chucking tool and the aspirator and the compressed gas means, for switching connection of the vacuum chucking tool to the aspirator or to the compressed gas means.

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