EP0436380A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Monolithic laser diode array and method of fabrication thereof
Assignee: Individual
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Filing: 1990-12-24
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Granted: —
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Expires: 2010-12-24
Abstract
Abstract Laser diode array fabrication is facilitated by provision of a monolithic substrate (10) with one or more grooves of the same approximate depth and width as laser diodes secured therein. A metallization layer (30) is provided in the grooves (20), and the laser diodes (40) secured in the grooves (20) thereafter. Depending on the size of the original substrate being used for the laser array mount, one or more submounts may be formed by cutting the substrate. Additionally, insertion of the laser diodes (40) into the grooves may be facilitated by flexure of the substrate from the bottom, thus separating the groove walls at the top.
Inventors
- 👤 Arthur A. Karpinski
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-09 14:05
CPC Classifications
H; H01; H01S; H01S5/00; H01S5/02; H01S5/022; H01S5/023; H01S5/02325; H01S5/02326; H01S5/40; H01S5/4018; H01S5/0235; H01S5/02355; H01S5/0237; H01S5/024; H01S5/02407; H01S5/02423; H01S5/04; H01S5/042; H01S5/0428; H01S5/4025; H01S5/4031
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
80 words
A monolithic laser diode array comprising: a monolithic substrate having upper and lower major surfaces and at least one groove formed in said upper major surface along a length of said substrate, said at least one groove having side walls formed vertically in said substrate; a metallization layer disposed along said side walls of said at least one groove to form at least one metallized groove; and a plurality of laser diodes disposed in said at least one metallized groove.
Claim 2
Dependent Claim
112 words
A monolithic laser diode array comprising: a monolithic substrate having upper and lower major surfaces and at least one groove formed in said upper major surface along a length of said substrate, wherein said substrate is formed of such a material and has such a thickness, and said at least one groove is formed to such a depth as to permit flexure of said substrate through provision of force in a direction from a bottom of said substrate; a metallization layer disposed along side walls of said at least one groove to form at least one metallized groove; and a plurality of laser diodes disposed in said at least one metallized groove.
Claim 3
Dependent Claim
51 words
An array as claimed in claim 1 or claim 2, wherein a plurality of grooves are formed in said upper major surface, such that said metallization layer forms a plurality of metallized grooves, and said plurality of laser diodes are disposed in each of said metallized grooves, forming a two-dimensional array.
Claim 4
Dependent Claim
25 words
An array as claimed in claim 1 or claim 2, wherein said substrate comprises a material selected from the group consisting of BeO and AlN.
Claim 5
Dependent Claim
27 words
An array as claimed in claim 1 or claim 2, wherein said metallization layer comprises a metal selected from the group consisting of Au, Ni, and Cr.
Claim 6
Dependent Claim
43 words
An array as claimed in claim 1 or claim 2, further comprising a soldering layer for attaching said plurality of laser diodes within said metallized groove, said soldering layer comprising a solder selected from the group consisting of Au/Si, Au/Sn, In, and Pb.
Claim 7
Dependent Claim
51 words
An array as claimed in claim 1 or claim 2, further comprising: a heat spreader mounted on said lower major surface of said substrate; a heat sink attached to an opposite side of said heat spreader from said substrate; and driving circuitry, connected to said substrate, for driving said laser diodes.
Claim 8
Dependent Claim
24 words
An array as claimed in claim 7, wherein said heat spreader is attached to said lower surface of said substrate via a eutectic bond.
Claim 9
Independent Claim
61 words
A method of forming monolithic laser diode arrays, said method comprising: providing a monolithic substrate; forming at least one groove in a major surface of said substrate; depositing a metallization layer along side walls of said at least one groove to form at least one metallization groove; and setting a plurality of laser diodes in said at least one metallization groove.
Claim 10
Dependent Claim
78 words
A method as claimed in claim 9, wherein: said forming step comprises the step of forming a plurality of grooves in said substrate; said depositing step comprises the step of depositing said metallization layer along side walls of each of said plurality of grooves to form a plurality of metallization grooves; and said setting step comprises the step of setting said plurality of laser diodes in each of said plurality of metallization grooves to form a two-dimensional array.
Claim 11
Dependent Claim
74 words
A method as claimed in claim 10, wherein said setting step comprises the steps of: flexing said substrate by applying a force from a side of said substrate opposite a side in which said plurality of grooves are formed, to separate said side walls of said grooves; placing said plurality of laser diodes in said plurality of grooves; and terminating application of said force so that said side walls return to their original positions.
Claim 12
Dependent Claim
36 words
A method as claimed in claim 9, wherein said setting step includes the step of applying adhesive, comprising a thermally and electrically conductive epoxy solder, along said side walls to secure said plurality of laser diodes.
References Cited (Backward Citations)
No citation records indexed.
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