EP0443154A2
Expired / Lapsed
EP
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Apparatus for and method of surface treatment for microelectronic devices
Assignee: Hitachi Ltd
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Filing: 1990-12-17
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Granted: —
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Expires: 2010-12-17
Abstract
Abstract An apparatus for surface treatment according to the present invention used for carrying out dry etching, thin film deposition and so forth is provided with a neutral beam etching apparatus in order to improve etching rate. In an embodiment, microwave wave-guides (1, 2) forming a duplex tube, a discharge tube (6), a pair of solenoids (4) arranged coaxially, a multiaperture electrode (3) for extracting an ion beam, gas supply pipes (5, 7), a set of charged particle retarding grids (8), a device (10) for controlling temperature of a specimen (9) and a vacuum unit (11) are provided.
Inventors
- 👤 Tatsumi Mizutani
- 👤 Takashi Yunogami
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-02 20:10
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32357
Claims Analysis
Total Claims: 30
Claim 1
Independent Claim
129 words
An apparatus for surface treatment, comprising in a same vacuum chamber: ion beam generating means for generating an ion beam, said ion beam generating means including first plasma generating means (22) and an ion beam extracting electrode (23); neutral beam generating means (28, 30) for generating a neutral beam by neutralizing ions in said ion beam; means (31) for irradiating a specimen surface with a neutral beam generated in said neutral beam generating means (22) after removing charged particles remaining in said neutral beam; means (25) for supplying molecules for generating chemical reactions in a material composing said specimen (32); and means (27-30) for exciting or dissociating said molecules, said exciting or dissociating means including second plasma generating means (28, 30) independent of said first plasma generating means (22).
Claim 2
Dependent Claim
22 words
An apparatus for surface treatment according to Claim 1, wherein a plurality of said second plasma generating means (28, 30) are provided.
Claim 3
Dependent Claim
31 words
An apparatus for surface treatment according to Claim 1, wherein said second plasma generating means (28, 30) are provided in an annular form on a wall surface of said vacuum chamber.
Claim 4
Dependent Claim
66 words
An apparatus for surface treatment according to Claim 1, 2 or 3, wherein: means (21, 35, 36) for supplying microwave power or means for supplying rf power is provided in said vacuum chamber; and said means (21, 35, 36) for supplying microwave power or said means for supplying rf power constitutes a part of each of said first and second plasma generating means (22, 28, 30).
Claim 5
Independent Claim
38 words
An apparatus for surface treatment according to one of Claims 1 to 4, comprising means (33) for controlling so as to maintain specimen surface temperature and temperature of a gas supplied to the specimen surface at predetermined values.
Claim 6
Independent Claim
73 words
An apparatus for surface treatment, comprising means for supplying an rf power or a microwave power to respective regions in a vacuum chamber (42) that have been divided into a plurality of regions and controlling electric energy of said rf power or said microwave power supplied to respective regions in said vacuum chamber, respectively, wherein one region among said plurality of regions is a region for generating plasma for extracting an ion beam.
Claim 7
Independent Claim
65 words
An apparatus for surface treatment, comprising: wave-guides (1, 2) having a duplex structure portion; a first plasma generating region and ion beam generating means (6) for generating an ion beam near one end of an internal wave-guide of said wave-guides (1, 2); and a second plasma generating region (12) for forming radicals near to one end of an external wave-guide of said wave-guides (1, 2).
Claim 8
Dependent Claim
24 words
An apparatus for surface treatment according to Claim 7, comprising means (10) for controlling the temperature of a specimen (9) at a predetermined value.
Claim 9
Independent Claim
42 words
An apparatus for surface treatment, comprising: a discharge tube (42) divided into a plurality of regions; a wave-guide (41) for supplying microwave to said discharge tube (42); and an ion-beam extracting electrode (44) arranged in one region among said plurality of regions.
Claim 10
Dependent Claim
37 words
An apparatus for surface treatment according to Claim 9, comprising means (50) for controlling so as to maintain a specimen (47) surface temperature and temperature of a gas supplied to the specimen (47) surface at predetermined values.
Claim 11
Dependent Claim
18 words
An apparatus for surface treatment according to Claim 9 or 10, comprising a microwave attenuator in said wave-guide.
Claim 12
Independent Claim
45 words
An apparatus for surface treatment, comprising: a plurality of grids (8, 31, 46); and means for applying desired voltage to each of said grids (8, 31, 46); wherein a function to prevent positive and negative charged particles from passing therethrough is provided to said grids.
Claim 13
Independent Claim
61 words
An apparatus for surface treatment having means for extracting an ion beam from plasma, wherein: said means for extracting an ion beam is composed of two multiaperture electrodes (83, 84); and a thickness of a multiaperture electrode (84) which is farther from said plasma of said two multiaperture electrodes is two times or more as large as the aperture diameter (d).
Claim 14
Independent Claim
107 words
A method of surface treatment in which a neutral beam generated in a vacuum chamber and radicals generated by forming particles within said vacuum chamber into a plasma are supplied to a surface of a specimen, wherein: generation of said neutral beam is effected by use of charge exchange reactions between an ion beam within said vacuum chamber and gas molecules; formation of said particles into said plasma is effected by producing a plasma in a space 10 cm or less distant from the surface of said specimen; and neutral radicals are selected among said radicals for supply to the specimen surface along with said neutral beam.
Claim 15
Dependent Claim
44 words
A method of surface treatment according to Claim 14, wherein a plurality of grids (31) are arranged just in front of a specimen (32), and charged particles are prevented from being incident on the specimen surface by applying required voltage to those grids (31).
Claim 16
Dependent Claim
24 words
A method of surface treatment according to Claim 14 or 15, wherein rare gas atoms are contained in the particles of said neutral beam.
Claim 17
Independent Claim
48 words
A method of surface treatment according to one of Claims 14 to 16, wherein neutral radicals supplied to the specimen surface are generated from a gas containing carbon, fluorine and hydrogen as constituents and a specimen composed of a material having SiO₂ as a principal component is etched.
Claim 18
Independent Claim
26 words
A method of surface treatment according to one of Claims 14 to 16, wherein the energy of said neutral beam is at 500 eV and below.
Claim 19
Independent Claim
51 words
A method of surface treatment according to one of Claims 14 to 16, wherein a specimen is held so that the specimen surface is oriented in a direction which is not normal to the direction of the neutral beam, and the surface of the specimen is treated while rotating the specimen.
Claim 20
Independent Claim
33 words
A method of surface treatment according to one of Claims 14 to 19, wherein surface treatment is carried out in a state in which the specimen temperature during surface treatment is maintained constant.
Claim 21
Dependent Claim
30 words
A method of surface treatment according to Claim 20, wherein surface treatment is carried out in a state in which said specimen temperature is held at - 100°C and below.
Claim 22
Dependent Claim
23 words
A grid (31) composed of a double layer structure of carbon and silicon or a double layer structure of silicon carbide and silicon.
Claim 23
Dependent Claim
17 words
A grid cassette with a plurality of said grids (31) set forth in Claim 22 incorporated therein.
Claim 24
Dependent Claim
7 words
A grid (31) formed of carbon fibers.
Claim 25
Dependent Claim
17 words
A grid cassette with a plurality of said grids (31) set forth in Claim 24 incorporated therein.
Claim 26
Dependent Claim
44 words
A grid (31) formed of carbon fibers in which carbon fibers (130) are knitted in a mesh form so that mesh space between a first carbon fiber and a second carbon fiber is not smaller than 0.5 mm and not larger than 1.0 mm.
Claim 27
Dependent Claim
17 words
A grid cassette with a plurality of said grids (31) set forth in Claim 26 incorporated therein.
Claim 28
Dependent Claim
27 words
A grid having a function of forming an electric field for retarding proceeding of charged particles in a vacuum chamber and formed of carbon or carbon compound.
Claim 29
Dependent Claim
35 words
Parallel plate electrodes (64, 65), wherein a positive voltage and a negative voltage are applied alternately to every other electrode in a plate electrode composed of a plurality of plates arranged parallel with one another.
Claim 30
Dependent Claim
20 words
Parallel plate electrodes according to Claim 29, wherein the electrode material is any one of carbon, silicon and silicon carbide.
References Cited (Backward Citations)
No citation records indexed.
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