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EP0563744A2 Expired / Lapsed EP ⏱️ 0.0 years remaining

Method of electrochemical fine processing

Assignee: Seiko Instruments Inc
•
Filing: 1993-03-22
•
Granted: —
•
Expires: 2013-03-22
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Abstract

Abstract An electrochemical fine processing method for forming a pattern of a substance having different etching resistance against an etching solution from that of the article to be processed by bringing the minute forward end of the counter electrode close to the surface of the article to be processed. The counter electrode is applied a predetermined electric potential and the electrochemical reaction is repeating in a minute region of the article to be processed in the vicinity of the counter electrode to form an optional pattern. After forming the pattern, the article to be processed is etched in an etching solution having a property of different etching rate for the pattern forming portion and a portion other than the pattern forming portion. It become possible to form a fine pattern directly onto the surface of an article to be processed having surface unevenness.

Inventors

  • 👤 Masayuki c/o Seiko Instruments Inc. Suda
  • 👤 Toshihiko C/O Seiko Instruments Inc. Sakuhara
  • 👤 Masataka c/o Seiko Instruments Inc. Shinogi
  • 👤 Fumiharu C/O Seiko Instruments Inc. Iwasaki
  • 👤 Akito c/o Seiko Instruments Inc. Ando

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-11-06 13:42
CPC Classifications
C; C23; C23F; C23F1/00; C23F1/02; B; B23; B23H; B23H9/00

Claims Analysis

Total Claims: 8
Claim 1
Independent Claim 173 words
An electrochemical fine processing method comprising the steps of: preparing an article to be processed in a electrolytic solution in which the article is composed of a material having changable etching resistance against an etching solution, wherein the etching resistance is changed by an electrochemical reaction; placing a minute forward end of a counter electrode close to a surface of the article to be processed; forming a pattern of a substance having different etching resistance against an etching solution from that of the article to be processed by bringing the minute forward end of the counter electrode close to the surface of the article to be processed, applying a predetermined electric potential to the counter electrode and repeating an operation of the electrochemical reaction in a minute region of the article to be processed in the vicinity of the counter electrode; and etching the article to be processed in an etching solution having a property of different etching rate for the pattern forming portion and a portion other than the pattern forming portion.
Claim 2
Dependent Claim 31 words
An electrochemical fine processing method according to claim 1; wherein the electrochemical reaction is oxidation reaction to form an oxidized substance of the article to be processed for forming the pattern.
Claim 3
Dependent Claim 31 words
An electrochemical fine processing method according to claim 1; wherein the electrochemical reaction is reduction reaction to form a reduced substance of the article to be processed for forming the pattern.
Claim 4
Dependent Claim 35 words
An electrochemical fine processing method according to claim 1; wherein the electrochemical reaction is deposition reaction to form a deposited substance from the electrolytic solution on the article to be processed for forming the pattern.
Claim 5
Dependent Claim 31 words
An electrochemical fine processing method according to claim 1; wherein surface of the article to be processed is coated with a coating substance having changable etching resistance against an etching solution.
Claim 6
Dependent Claim 46 words
An electrochemical fine processing method according to claim 1; wherein the etching solution has a property to dissolve the pattern forming portion of the article to be processed and not to dissolve a portion other than the pattern forming portion of the article to be processed.
Claim 7
Dependent Claim 46 words
An electrochemical fine processing method according to claim 1; wherein the etching solution has a property not to dissolve the pattern forming portion of the article to be processed and to dissolve a portion other than the pattern forming portion of the article to be processed.
Claim 8
Dependent Claim 33 words
An electrochemical fine processing method according to claim 1; wherein the counter electrode has a plurality of projections each having a minute forward end arranged in accordance with a shape to be processed.

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