EP0694949A2
Expired / Lapsed
EP
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Inductively coupled plasma reactors
Assignee: Applied Materials Inc
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Filing: 1995-06-12
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Granted: —
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Expires: 2015-06-12
Abstract
Abstract The disclosure relates to a plasma reactor in which capacitive coupling and RF power dissipation is advantageously reduced by employing an RF coil (12) having plural coil sections (12a,12b,12c), each coil section connected across an RF source (22), commonly tapped ones of the coil sections being wound in opposite directions. Capacitive coupling and RF power dissipation is further reduced by employing a top lid (24) having an outer insulating annulus (26) and an inner conducting disk portion (28), the conducting disk portion being displaced or spaced apart from the coil by the width of the annulus. This displacement significantly reduces the RF power dissipation or coupling from the top winding of the coil to the lid. Furthermore, the plural coil sections or mirror coil configuration reduces sputtering of insulative material induced by capacitive RF coupling.
Inventors
- 👤 Gerald Zheyao Yin
- 👤 Hiroji Hanawa
- 👤 Diana Xiaobing Ma
- 👤 Donald Olgado
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-29 09:12
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32082; H01J37/321; H01J37/3211; H01J37/32431; H01J37/32458; H01J37/3244; H01J37/32715; H10; H10P; H10P72/00; H10P72/04; H10P72/0402
Claims Analysis
Total Claims: 32
Claim 1
Independent Claim
136 words
A plasma reactor comprising: a vacuum chamber having an at least partially insulating upper portion; an RF power source having an RF power terminal and a return terminal connected to an RF ground; an RF inductor coil wound around said insulating upper portion, said RF inductor coil comprising plural coil sections each connected across said RF power terminal and said RF ground, each one of said coil sections being wrapped around said insulating upper portion, at least a pair of said coil sections being connected at respective ends thereof through a common tap point to said RF power terminal and each coil section of said pair being wound in opposite rotational directions; means for supplying a gas into said chamber; a wafer pedestal in said chamber for supporting a wafer to be processing inside said chamber.
Claim 2
Dependent Claim
28 words
The reactor of Claim 1 wherein said insulating upper portion comprises a top cylindrical side wall portion, said chamber further comprising a lower conductive cylindrical side wall portion.
Claim 3
Dependent Claim
39 words
The reactor of Claim 2 further comprising a ceiling overlying said top cylindrical side wall portion, said ceiling having a conductive center portion and an insulating annular portion adjacent said cylindrical side wall and surrounding said conductive center portion.
Claim 4
Dependent Claim
48 words
The reactor of Claim 3 wherein said second ends of said coil sections are adjacent respective ones of said conductive lower side wall portion, and wherein said conductive center portion of said ceiling and said lower conductive portion of said side wall are connected to said RF ground.
Claim 5
Dependent Claim
23 words
The reactor of Claim 1 wherein said insulating upper portion comprises at least a first portion of a dome top of said chamber.
Claim 6
Dependent Claim
49 words
The reactor of Claim 5 wherein said dome top comprises a second portion which is a conductive center section at an apex of said dome top and an insulating annulus surrounding said conductive center section, said RF inductor being wound only around said first portion of said dome top.
Claim 7
Dependent Claim
57 words
The reactor of Claim 6 wherein said second ends of said coil sections are adjacent respective ones of said conductive lower side wall portion and said second portion of said dome top, and wherein said conductive center section of said dome top and said lower conductive portion of said side wall are connected to said RF ground.
Claim 8
Dependent Claim
28 words
The reactor of Claim 5 wherein said upper portion comprises the entire dome top and said RF inductor coil is wound around the entirety of said dome top.
Claim 9
Dependent Claim
51 words
The reactor of Claim 1 wherein said RF inductor coil comprises a helically wound conductor having a pair of ends and a middle, said coil being divided into said two sections at said middle, and wherein said middle comprises said first terminals and said pair of ends comprises said second terminals.
Claim 10
Dependent Claim
24 words
The reactor of Claim 9 wherein said helically wound conductor is wound in a cylinder shape and wherein said two sections are mirror coils.
Claim 11
Dependent Claim
13 words
The reactor of Claim 1 wherein said insulating annulus comprises a ceramic material.
Claim 12
Dependent Claim
12 words
The reactor of Claim 11 wherein said ceramic material comprises aluminum oxide.
Claim 13
Dependent Claim
55 words
The reactor of Claim 1 further comprising a third coil section connected at one end thereof to said RF ground at a second common tap point with an end of one of said pair of coil sections, said third coil section and said one of said pair of coil sections being wound in opposite directions.
Claim 14
Dependent Claim
93 words
The reactor of Claim 1 wherein said plural coil sections comprise pairs of coil sections, a respective coil section being within two of said pairs of coil sections, each pair of coil sections having a common tap to one end of each coil section in the pair of coil sections, coil sections within each of pair being wound in opposite directions, the common taps of alternate ones of said pairs being connected to said RF power terminal and the common taps of remaining ones of said pairs being connected to said RF ground.
Claim 15
Dependent Claim
74 words
A plasma reactor comprising: a vacuum chamber having a containment wall; means for introducing a gas into said vacuum chamber; an RF source; an RF coil wound around a first portion of said containment wall and comprising plural coil sections, at least two of said plural coil sections being wound in opposite directions and having facing ends connected at a first common tap to said RF source and their other ends connected to ground.
Claim 16
Dependent Claim
53 words
The reactor of Claim 15 further comprising a third coil section connected at one end thereof to ground at a second common tap point with an end of one of said pair of coil sections, said third coil section and said one of said pair of coil sections being wound in opposite directions.
Claim 17
Dependent Claim
91 words
The reactor of Claim 15 wherein said plural coil sections comprise pairs of coil sections, a respective coil section being within two of said pairs of coil sections, each pair of coil sections having a common tap to one end of each coil section in the pair of coil sections, coil sections within each of pair being wound in opposite directions, the common taps of alternate ones of said pairs being connected to said RF source terminal and the common taps of remaining ones of said pairs being connected to ground.
Claim 18
Dependent Claim
25 words
The plasma reactor of Claim 15 wherein there are two coil sections and said coil is connected to said RF source in a mirror configuration.
Claim 19
Dependent Claim
63 words
The plasma reactor of Claim 15 wherein said first portion of said containment wall comprises a cylindrical side wall having a conductive section thereof below said coil and a lid above said coil, said lid having a conductive portion thereof spaced apart from said cylindrical side wall, a remaining portion of said lid between said conductive portion and said side wall being insulative.
Claim 20
Dependent Claim
33 words
The plasma reactor of Claim 19 wherein said conductive portion of said lid and said conductive section of said side wall are both connected to an RF return node of said RF source.
Claim 21
Dependent Claim
15 words
The plasma reactor of Claim 20 wherein said RF return node is a ground node.
Claim 22
Dependent Claim
30 words
The plasma reactor of Claim 15 wherein said first portion of said containment wall comprises a dome-shaped lid, and another portion of said containment wall comprises a conductive side wall.
Claim 23
Dependent Claim
42 words
The plasma reactor of Claim 22 wherein said coil is wound as a conical helix conforming with said dome-shaped lid, and wherein one there are two of said coil sections, said coil being connected in a mirror configuration to said RF source.
Claim 24
Dependent Claim
36 words
The plasma reactor of Claim 23 wherein an upper one of said sections has an end at the apex of said dome-shaped lid, said end being connected to an RF return node of said RF source.
Claim 25
Dependent Claim
15 words
The plasma reactor of Claim 22 wherein said dome-shaped lid is comprised of insulative material.
Claim 26
Dependent Claim
35 words
The reactor of Claim 24 wherein each section has a pair of ends, one end being connected to said RF source and the other end connected to an RF return node of said RF source.
Claim 27
Dependent Claim
71 words
The reactor of Claim 26 wherein there are two of said sections, and said RF coil comprises a helically wound conductor having a pair of ends and a middle, said coil being divided into said two sections at said middle, and wherein said middle is connected by a conductor to said RF source and wherein said pair of ends are both connected to an RF return node of said RF source.
Claim 28
Dependent Claim
132 words
A plasma reactor, comprising: a vacuum chamber shell comprising two conductive shell sections and an insulating shell section between said two conductive shell sections, said two conductive shell sections being connected to a return conductive path; means for introducing a processing gas into said vacuum chamber; an RF coil antenna wound around said insulating shell section and having at least two coil ends adjacent respective ones of said two conductive shell sections, said two coil ends being connected to said return conductive path so as to be at the same electrical potential as said two conductive shell sections; and an RF power source having a power terminal connected to said RF coil antenna at a point intermediate said two coil ends and an RF return terminal connected to said return conductive path.
Claim 29
Dependent Claim
12 words
The reactor of Claim 28 wherein said return path is RF ground.
Claim 30
Dependent Claim
132 words
A plasma reactor, comprising: a vacuum chamber shell comprising a conductive shell section and an insulating shell section adjacent said conductive shell section, said conductive shell section being connected to a return conductive path; means for introducing a processing gas into said chamber; an RF coil antenna wound around said insulating shell section and having two coil ends, one of said two coil ends being adjacent said conductive shell section, said two coil ends being connected to said return conductive path so that said one coil end is at the same electrical potential as said conductive shell section; and an RF power source having a power terminal connected to said RF coil antenna at a point intermediate said two coil ends and an RF return terminal connected to said return conductive path.
Claim 31
Dependent Claim
12 words
The reactor of Claim 30 wherein said return path is RF ground.
Claim 32
Dependent Claim
54 words
The reactor of Claim 30 wherein said RF coil antenna is wound in a first direction from one of said two coil ends to said point intermediate said two coil ends and is wound in an opposite direction from the other of said two coil ends to said point intermediate said two coil ends.
References Cited (Backward Citations)
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