Light source unit and exposure apparatus having the same

Claim 2

A light source unit according to claim 1, further comprising: a target supply unit for supplying a target; a laser unit for generating plasma, the laser unit including a laser generator for emitting a laser beam and a condenser for condensing the laser beam; and an optical element for condensing the light emitted from the plasma.

Claim 3

A light source unit according to claim 2, wherein said stabilizer includes: at least one of a first detector for detecting a position of the light, a second detector for detecting a position of the plasma, a third detector for detecting a position and/or an angle of said optical element, and a fourth detector for detecting a position and/or angle of the condenser; at least one of a first adjuster for adjusting a position and/or angle of said optical element, a second adjuster for adjusting a position and/or angle of the condenser, and a third adjuster for adjusting a position and/or angle of said target supply unit; and a controller for controlling at least one of the first to third adjusters so as to maintain a position of the light in place based on a detection result by at least one of the first to fourth detectors.

Claim 4

A light source unit according to claim 1, further comprising: a gas supply unit for supplying working gas; a voltage feeder including an electrode for applying a voltage to the working gas, said voltage feeder generating the plasma; and an optical element for condensing the light emitted from the plasma.

Claim 5

A light source unit according to claim 4, wherein said stabilizer includes: at least one of a first detector for detecting a position of the light, a second detector for detecting a position of the plasma, a third detector for detecting a position and/or an angle of said optical element, and a fourth detector for detecting a position and/or angle of the electrode; at least one of a first adjuster for adjusting a position and/or angle of said optical element, and a second adjuster for adjusting a position and/or angle of the electrode; and a controller for controlling at least one of the first and second adjusters so as to maintain a position of the light in place based on a detection result by at least one of the first and second detectors.

Claim 6

An exposure apparatus for exposing a pattern of a mask onto an object, said exposure apparatus comprising: a light source unit according to claim 1; an illumination optical system for illuminating the reticle using light supplied from said light source unit; and a projection optical system for projecting the pattern of the reticle onto the object.

Claim 7

A device manufacturing method comprising the steps of: exposing an object using an exposure apparatus; developing the object that has been exposed; and using at least a part of the developed object to make a device, wherein said exposure apparatus includes: a light source unit according to claim 1; an illumination optical system for illuminating the reticle using light supplied from said light source unit; and a projection optical system for projecting the pattern of the reticle onto the object.

Claim 8

A measuring apparatus for measuring reflectance of an object, said measuring apparatus comprising: a light source unit according to claim 1; an irradiating unit for irradiating light supplied from said light source unit upon the object; and a detector for detecting the light reflected from the object.

Claim 9

A light source unit for supplying light from a plasma, comprising stabilising means for reducing fluctuations of the position of the light supplied by the light source unit.

Claim 10

A light source unit according to claim 9 in which the stabilising means comprises means for adjusting the position of at least one of (i) the plasma and (ii) a reflector for reflecting light from the plasma.