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JPH0198901A Expired / Lapsed JP ⏱️ 0.0 years remaining

Straightness meter

Assignee: Mitsubishi Materials Silicon Corp
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Filing: 1987-10-12
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Granted: —
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Expires: 2007-10-12
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Abstract

Abstract PURPOSE:To obtain a device which is under smaller influence of a movement error accompanying the movement of a moving table by making the correlation between detected quantities of displacement detectors clear when the moving table where the two displacement detectors are fixed has an error in linear motion. CONSTITUTION:A reference gauge 1 has a reference surface 1a formed including a straight part as a reference of measurement at its lower part. A guide rail 2 of the same size in the same shape is provided slantingly below and fixed by fixing blocks 3a and 3b together with the gauge 1 in parallel. Then, the rail 2 is fitted in the rectangular hole 4a of the moving table 4 and slidable along it in the lengthwise direction of the reference surface 1a of the gauge 1. The lever type displacement detectors 5 and 6a are fixed to the plane part 4b of this moving table 4 in parallel. The correcting value of the detected quantity of the detector 5 for the detected quantity of the detects 6 is predetermined according to the correlation between their detected quantities. Then, the device is installed at a position of measurement, and the moving table 4 is moved to detect the straight part of an object of measurement by the detector and also detects the reference straight part of the reference surface 1a by the detector 6, thereby performing correction according to them.

Inventors

  • 👤 Hideaki Minami
  • 👤 南 秀旻

Bibliographic Details

Application Number —
Jurisdiction JP
Data Source google_patents
Last Synchronized 2026-11-08 10:43
CPC Classifications
—

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References Cited (Backward Citations)

JPS5045293U Cited
JPS56137011U Cited
JPS5824165U Cited

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