Apparatus and method for displaying surface contour of convex object

Abstract

Abstract PURPOSE: To generate an array of phase data automatically and compactly to the surface of an object of which outline is displayed without distorting the object caused by contact by providing an optical unit and a shadow image detector. CONSTITUTION: A detector 50 for detecting the shadow image at the fringe of a protruding object 70 is disposed with respect to an optical unit 40 for illuminating the object from the back thereof. The object 70 is interposed between the optical unit 40 and a detector 50. The detector 50 produces a plurality of outputs from a plurality of vertical positions of the shadow image at the fringe. Furthermore, a rotary table 60 produces a relative movement between the object 70 and the detector 50/optical unit 40. Output from the detector 50 is fed into a data processing system which determines the measurement of a subpixel distance at each of the plurality of vertical positions. These measurements of the distance are arranged in rows and columns thus configuring the surface outline of the object 70. According to the arrangement, and array of phase data can be generated automatically and compactly to the surface of the object 70.

Inventors

• 👤 Robert H Cormack
• 👤 ラバト、ハリスン、コーマック
• 👤 Carey S Brown
• 👤 カレイ、スカット、ブラウン

Bibliographic Details