Projection aligner for manufacture of integrated circuit

Abstract

Abstract PURPOSE:To make it possible to clearly print an integrated circuit on a wafer by a method wherein a narrow-band forming means, with which the wave width of the laser beam emitted from and excimer laser source will be reduced, is provided. CONSTITUTION:The title projection aligner is composed of a first positive lens group, a second negative lens group and a third lens group, having positive refractive force, in the order starting from the side of an object; and the first, second and third lens groups are constituted with a plurality of lenses made of a single glass material. A projection lens system has three lens groups, and the lens system is composed of a negative lens group having negative refracting power in the center part of the lens system, and a reduction system in which the first and third lens groups, having positive refracting power, arranged on both sides of the second lens group. The correction of spherical aberration is conducted mainly by setting the radius of curvature of the lens surface of the second lens group appropriately. On the lower light flux part, the aberration of an out-of axis light flux can be corrected in a well-balanced manner by a meniscus lens, having a surface protruding to the side of an object and arranged on the side of the object, and also the aberration of the out-of-axis light flux can be corrected in a well balanced manner by the negative meniscus lens, having a convex surface facing the side of the object, arranged on the side of the object, and the coma of out-of axis block can be corrected excellently.

Inventors

• 👤 Takamasa Hirose
• 👤 広瀬　隆昌

Bibliographic Details