JPS51138464A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Device for detecting relative position of plural articles
Assignee: Hitachi Ltd
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Filing: 1975-05-26
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Granted: —
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Expires: 1995-05-26
Abstract
Abstract PURPOSE: To provide an optical relative position detecting device which can detect images having sufficient contrast from all plural articles superimposed in arrangement such as mask, semiconductor wafer or the like. COPYRIGHT: (C)1976,JPO&Japio
Inventors
- 👤 Mitsuyoshi Koizumi
- 👤 Nobuyuki Akiyama
- 👤 Hiroshi Makihira
- 👤 Yasuo Nakagawa
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-10-29 05:30
CPC Classifications
—
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References Cited (Backward Citations)
JPS4922587A
Cited
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