JPS5339864A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Production of semiconductor element electrode
Assignee: NEC Corp
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Filing: 1976-09-24
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Granted: —
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Expires: 1996-09-24
Abstract
Abstract PURPOSE: To achieve the improvement in the adhesion strength of an oxide film and multilayer film electrodes by etching and cleaning the surface of the oxide film by the bombardment of Ar ions or meurtal Ar molecules. COPYRIGHT: (C)1978,JPO&Japio
Inventors
- 👤 Hiroshi Tsuda
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-11-03 08:53
CPC Classifications
—
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