JPS5969926A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Exposure method and device
Assignee: Hitachi Ltd
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Filing: 1982-10-15
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Granted: —
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Expires: 2002-10-15
Abstract
Abstract Translated from Japanese (57)【要約】本公報は電子出願前の出願データであるた め要約のデータは記録されません。 (57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Inventors
- 👤 Motoya Taniguchi
- 👤 素也 谷口
- 👤 Minoru Ikeda
- 👤 稔 池田
- 👤 Yoshihiro Yoneyama
- 👤 米山 義弘
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-10-30 17:24
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70691; G03F7/707; G03F7/70216; G03F7/703
Claims Analysis
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References Cited (Backward Citations)
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