Method for measuring shape of surface

Abstract

Abstract PURPOSE:To measure the shape of the surface of a material to be measured, whose surface is of a curved shape highly accurately in a short time, by moving a measuring probe in the direction along the surface vector of the material to be measured. CONSTITUTION:As measuring data of a measuring reference point 48 with respect to a measuring point 46 for a material to be measured 26, at least three- dimensional coordinate values and the surface vectors, which are vertical to the coordinate axes in three dimensions are determined. Based on the measuring data, the amount of movement of a measuring probe 20 with respect to the measuring point 46 is obtained. At least the moving direction, where the moving direction of the measuring probe 20 when it is contacted with the material to be measured 26 becomes the direction of the surface vector, is further obtained. Then the measuring probe 20 is moved in accordance with the moving amount and the moving direction obtained. Thus, even though the measuring probe 20 is moved at a high speed, the measuring probe 20 is not slidden when it is contacted to the material to be measured 26. Therefore, the surface shape of the material to be measured, whose surface is of a curved shaped, can be measured highly accurately in a short time.

Inventors

• 👤 Riichi Makino
• 👤 牧野　利一

Bibliographic Details