X-ray exposure device

Abstract

Abstract PURPOSE:To contrive to enhance uniformity of X-ray intensity distribution by a method wherein a means to measure X-ray intensity distribution at an exposing surface, and a means to transfer an exposing substance conforming to the X-ray intensity distribution thereof are provided. CONSTITUTION:An exposing substance 2 is put upon a transferably movable base 1. Detectors 3 of the plural number of pieces are arranged symmetrically centering the mechanically central axis of an X-ray source at the periphery of the movable base 1 thereof as an X-ray (b) intensity distibution measuring means. At the device thereof, when X-ray intensity distribution at an exposing surface put on with the substance 2 becomes ununiformly, differences are generated to detection outputs of the respective detectors 3. When the shape of the relative intensity distribution curve of the X-ray mentioned above is known, the movable base 1 is transferred, the movable base 1 is so transferred as to make the central position of X-ray intensity distribution and the central position of the substance 2 to coincide, and controlled as to make X-ray intensity distribution to become symmetrically centering the central position of the substance 2.

Inventors

• 👤 Masaki Yamabe
• 👤 山部　正樹
• 👤 Yoshitaka Kitamura
• 👤 北村　芳隆
• 👤 Yasuo Furukawa
• 👤 古川　泰男

Bibliographic Details