Generating circuit for substrate voltage

Abstract

Abstract PURPOSE:To obtain the titled device of small voltage variation rate by a method wherein signals of different phases are led out of the same oscillation circuit and synthesized by staggering the timing of the rise-fall of clock signal of the maximum variation in voltage. CONSTITUTION:When clock signals are given to a unit pressurizing circuit 25 by an inverter 16 and to a unit pressuring circuit 26 by an inverter 17, actions of the first electrode potential 27 of a MOSFET19 and the first electrode potential 28 of a MOSFET22 come into signal waveforms (27) and (28) of the figure, respectively, by the function of MOSFETs 19, 20, 22, 23 and capacitors 18 and 21. Then, the substrate potential -VSUB comes into a waveform (-VSUB) in the figure. Comparing this potential waveform (-VSUB) with the conventional potential waveform will result in detail supply of charges to -VSUB.

Inventors

• 👤 Masami Hashimoto
• 👤 正美 橋本

Bibliographic Details