Work carry-in and out device in polisher

Abstract

Abstract PURPOSE:To ensure the carry-in and out of workpieces to and from a plurality of holes on a carrier by providing an index table, a chuck device, a detector and the like in the workpiece carry-in and out device of a polisher for polishing the surfaces of the workpieces on upper and lower surface plates. CONSTITUTION:In the operation of the subject device, a workpiece 'W' is placed on an index table 40 according to the same arrangement as in a carrier 15. Then, a chuck device 23 is made to agree to the rotary angle of the index table 40 and chuck the workpiece 'W'. Furthermore, the chuck device 23 moves to a position over a lower surface plate 11 and the center hole of the carrier 15 is detected by a detector. In this case, air is blown for the removal of a grinding fluid, if any, in the hole. Thereafter, a ram 22, a turn-lifter 21, the chuck device 23 and the like are adjusted for aligning the centers of a chuck part and a workpiece retaining hole 16, and each workpiece 'W' is fed to the workpiece retaining hole 16. According to the aforesaid constitution, the carry-in and out of the workpiece 'X' can be made properly.

Inventors

• 👤 Hideo Kawakami
• 👤 川上　英雄
• 👤 Masami Endo
• 👤 正美 遠藤

Bibliographic Details