Linear guide mechanism

Abstract

Abstract PURPOSE:To obtain a movable linear guide of non-contact with each other, by fitting the member for suppressing vertical and horizontal vibrations at the nodes to a piezoelectric vibrator, and by generating air pressure in a space between the vibrator and the guide member with the vibration of the vibrator to lift them up. CONSTITUTION:Electrodes 20 are fitted confronting two faces of a piezoelectric vibrator 17 vibrating in the vertical and horizontal directions, and struts 19 are fitted on the node sections of the vertical and horizontal vibrations. The vibrator 17 is combined with a guide member 16 having a guide face in the horizontal and vertical directions. When voltage is applied to the electrodes 20 to generate vibration in this state, then air pressure generates in spaces 13-15 between the vibrator 17 and each face of the guide member 16, and they are lifted up in non-contact with each other, so they are moved in the linear direction via a bearing plate 18 or the like fitted on the bearing members 19 for example.

Inventors

• 👤 Teruuna Terachi
• 👤 寺地　照内
• 👤 Toshiya Uchida
• 👤 俊哉 内田

Bibliographic Details