US3058842A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Evaporation method
Assignee: International Business Machines Corp
•
Filing: 1958-12-29
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Granted: 1962-10-16
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Expires: 1978-12-29
Abstract
No abstract record available.
Inventors
- 👤 George J Kahan
- 👤 Cormier Francis S De
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 09:36
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; Y; Y10; Y10S; Y10S505/00; Y10S505/80; Y10S505/815; Y10S505/818; Y10S505/819
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
182 words
THE METHOD OF RAPIDLY EVAPORATING COATING OF A FIRST METAL IN A VACUUM AND ONTO A SUBSTRATE SO AS TO HAVE A HIGH DEGREE OF PURITY AND UNIFORMITY COMPRISING THE STEPS OF PLACING SAID FIRST METAL AND A SECOND METAL WITHIN AN EVAPORTION SOURCE STRUCTURE, SAID SECOND METAL BEING SELECTED FROM THE GROUP CONSISTING OF MOLYBDENUM, TANTALUM, AND TUGSTEN, SAID SOURCE STRUCTURE CONSISTING OF A MATERIAL INEFFECTIVE TO ALLOY WITH EITHER OF SAID FIRST AND SAID SECOND METALS; SUBJECTING SAID SOURCE STRUCTURE TO A FIRST PREDETERMINED TEMPERATURE AT WHICH SAID FIRST AND ONLY IS CHANGED TO A LIQUID STATE AND FLOWS IN CONTACT WITH SAID SECOND METAL, SAID SECOND METAL BEING CAPABLE OF REDUCING OXIDE IMPURITIES OF SAID FIRST METAL AND FORMING AN OXIDE VOLATILIZATION AT SAID FIRST TEMPERATURE WHEREBY CLEAN SURFACE OF SAID LIQUID FIRST METAL ARE EXPOSED; SUBSEQUENTLY SUBJECTING SAID SOURCE STRUCTURE TO A SECOND PREDETERMINED TEMPERATURE BELOW THETEMPERATURE OF SAID SECOND METAL AND AT WHICH SAID FIRST METAL IS RAPIDLY EVORATED; AND EXPOSING SAID SUBSTRATE DURING SAID LAST-MENTIONED STEP TO ALLOW SAID EVAPORATED FIRST METAL TO BE DEPOSITED THEREON.
Claim 2
Independent Claim
182 words
THE METHOD OF RAPIDLY EVAPORATING COATING OF A FIRST METAL IN A VACUUM AND ONTO A SUBSTRATE SO AS TO HAVE A HIGH DEGREE OF PURITY AND UNIFORMITY COMPRISING THE STEPS OF PLACING SAID FIRST METAL AND A SECOND METAL WITHIN AN EVAPORTION SOURCE STRUCTURE, SAID SECOND METAL BEING SELECTED FROM THE GROUP CONSISTING OF MOLYBDENUM, TANTALUM, AND TUGSTEN, SAID SOURCE STRUCTURE CONSISTING OF A MATERIAL INEFFECTIVE TO ALLOY WITH EITHER OF SAID FIRST AND SAID SECOND METALS; SUBJECTING SAID SOURCE STRUCTURE TO A FIRST PREDETERMINED TEMPERATURE AT WHICH SAID FIRST AND ONLY IS CHANGED TO A LIQUID STATE AND FLOWS IN CONTACT WITH SAID SECOND METAL, SAID SECOND METAL BEING CAPABLE OF REDUCING OXIDE IMPURITIES OF SAID FIRST METAL AND FORMING AN OXIDE VOLATILIZATION AT SAID FIRST TEMPERATURE WHEREBY CLEAN SURFACE OF SAID LIQUID FIRST METAL ARE EXPOSED; SUBSEQUENTLY SUBJECTING SAID SOURCE STRUCTURE TO A SECOND PREDETERMINED TEMPERATURE BELOW THETEMPERATURE OF SAID SECOND METAL AND AT WHICH SAID FIRST METAL IS RAPIDLY EVORATED; AND EXPOSING SAID SUBSTRATE DURING SAID LAST-MENTIONED STEP TO ALLOW SAID EVAPORATED FIRST METAL TO BE DEPOSITED THEREON.
References Cited (Backward Citations)
US2160981A
Cited
US2589175A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1965-10-15 | 1966-04-16 | 1966-10-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1969-10-15 | 1970-04-16 | 1970-10-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1973-10-15 | 1974-04-16 | 1974-10-16 | $7700.00 | Window Closed / Lapsed |