US3172792A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Epitaxial deposition in a vacuum onto semiconductor wafers through an in- teracttgn between the wafer and the support material
Assignee: —
•
Filing: —
•
Granted: 1965-03-09
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Expires: 1982-03-09
Abstract
No abstract record available.
Inventors
No inventors recorded.
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 09:58
CPC Classifications
C; C30; C30B; C30B29/00; C30B29/02; C30B29/06; C30B25/00; C30B25/02; C30B29/08
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
69 words
A PROCESS FOR GROWING AN EPITAXIAL SEMICONDUCTOR FILM ON A SINGLE CRYSTAL SEMICONDUCTOR SUBSTRATE WHICH COMPRISES MOUNTING SAID SUBSTRATE ADJACENT TO A SEMICONDUCTOR TRANSFER BODY IN A CLOSED ATMOSPHERE COMPRISING A HALIDE OF THE SEMICONDUCTOR OF SAID TRANSFER BODY AT A REDUCED PRESSURE IN THE RANGE OF 10-1MM. HG TO 10-6 MM. HG, SAID TRANSFER BODY COMPRISING THE SEMICONDUCTOR MATERIAL DESIRED IN THE FILM, SAID SUBSTRATE AND SAID TRANS-
Claim 2
Dependent Claim
69 words
A PROCESS FOR GROWING AN EPITAXIAL SEMICONDUCTOR FILM ON A SINGLE CRYSTAL SEMICONDUCTOR SUBSTRATE WHICH COMPRISES MOUNTING SAID SUBSTRATE ADJACENT TO A SEMICONDUCTOR TRANSFER BODY IN A CLOSED ATMOSPHERE COMPRISING A HALIDE OF THE SEMICONDUCTOR OF SAID TRANSFER BODY AT A REDUCED PRESSURE IN THE RANGE OF 10-1MM. HG TO 10-6 MM. HG, SAID TRANSFER BODY COMPRISING THE SEMICONDUCTOR MATERIAL DESIRED IN THE FILM, SAID SUBSTRATE AND SAID TRANS-
References Cited (Backward Citations)
US2989376A
Cited
US3000768A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1968-03-08 | 1968-09-07 | 1969-03-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1972-03-08 | 1972-09-07 | 1973-03-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1976-03-08 | 1976-09-07 | 1977-03-09 | $7700.00 | Window Closed / Lapsed |