US3192136A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of preparing precision screens
Assignee: Unisys Corp
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Filing: 1962-09-14
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Granted: 1965-06-29
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Expires: 1982-09-14
Abstract
No abstract record available.
Inventors
- 👤 Gilbert R Reid
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 08:56
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/20; C; C23; C23F; C23F1/00; C23F1/02; C25; C25D; C25D1/00; C25D1/10; C25D5/00; C25D5/02; G03F7/00; G03F7/004; G03F7/09; G03F7/095; G03F7/0957; G03F7/12
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
259 words
THE METHOD OF PREPARING PRECISION SCREENS AND MASKS WHICH COMPRISES: (A) COATING A SUBSTRATE HAVING AN ELECTRICALLY CONDUCTIVE SURFACE WITH A FIRST LAYER OF PHOTO RESIST MATERIAL, (B) DEVELOPING A FIRST IMAGE ON SAID PHOTO RESIST MATERIAL AND REMOVING UNEXPECTED PORTIONS OF SAID PHOTO RESIST MATERIAL FROM SAID SUBSTRATE, (C) ELECTRODEPOSITING A FIRST LAYER OF SELECTIVELY ETCHRESISTANT FIRST MATERIAL ON SAID SUBSTRATE WHERE SAID SELECTED PORTIONS OF SAID PHOTO RESIST MATERIAL HAVE BEEN REMOVED, (D) REMOVING THE REMAINING PORTION OF SAID FIRST LAYER OF PHOTO RESIST MATERIAL, (E) ELECTROPLATING A SELECTIVELY ETCHABLED SECOND MATERIAL ON SAID ETCH-RESISTANT MATERIAL TO COMPELELY COVER SAID ETCH-RESISTANT FIRST MATERIAL AND THAT SPACE PREVIOUSLY OCCUPIED BY SAID REMAINING PORTION OF PHOTO RESIST MATERIAL REMOVED HEREINABOVE, SAID SECOND MATERIAL BEING SELECTIVELY ETCHABLE WITH RESPECT TO SAID FIRST MATERIAL AND TO THE THIRD MATERIAL MENTIONED HEREINBELOW, (F) COATING SAID ETCHABLE SECOND MATERIAL WITH A SECOND LAYER OF PHOTO RESIST MATERIAL, (G) DEVELOPING ON SAID SECOND LAYER OF PHOTO RESIST MATERIAL IN ALIGNMENT WITH SAID FIRST IMAGE, A SECOND IMAGE CORRESPONDING TO AND COEXTENSIVE IN DESIGN AND AREA WITH RESPECT TO SAID FIRST IMAGE AND REMOVING THE UNEXPOSED PORTIONS OF PHOTO RESIST MATERIAL, (H) ELECTROPLATNG AS A SECOND LAYER SELECTIVELY ETCHRESISTANT THIRD MATERIAL ON SAID ETCHABLE SECOND MATERIAL WHERE SAID UNEXPOSED PORTIONS OF PHOTO RESIST MATERIAL HAVE BEEN REMOVED FROM SAID SECOND LAYER OF PHOTO RESIST MATERIAL, (I) REMOVING THE REMAINING EXPOSED PORTION OF SAID SECOND LAYER OF PHOTO RESIST, AND (J) ETCHING SAID ETCHABLE SECOND MATERIAL WITH ETCHING FLUID TO CONJOIN SAID FIRST AND SECOND IMAGES.
Claim 2
Independent Claim
259 words
THE METHOD OF PREPARING PRECISION SCREENS AND MASKS WHICH COMPRISES: (A) COATING A SUBSTRATE HAVING AN ELECTRICALLY CONDUCTIVE SURFACE WITH A FIRST LAYER OF PHOTO RESIST MATERIAL, (B) DEVELOPING A FIRST IMAGE ON SAID PHOTO RESIST MATERIAL AND REMOVING UNEXPECTED PORTIONS OF SAID PHOTO RESIST MATERIAL FROM SAID SUBSTRATE, (C) ELECTRODEPOSITING A FIRST LAYER OF SELECTIVELY ETCHRESISTANT FIRST MATERIAL ON SAID SUBSTRATE WHERE SAID SELECTED PORTIONS OF SAID PHOTO RESIST MATERIAL HAVE BEEN REMOVED, (D) REMOVING THE REMAINING PORTION OF SAID FIRST LAYER OF PHOTO RESIST MATERIAL, (E) ELECTROPLATING A SELECTIVELY ETCHABLED SECOND MATERIAL ON SAID ETCH-RESISTANT MATERIAL TO COMPELELY COVER SAID ETCH-RESISTANT FIRST MATERIAL AND THAT SPACE PREVIOUSLY OCCUPIED BY SAID REMAINING PORTION OF PHOTO RESIST MATERIAL REMOVED HEREINABOVE, SAID SECOND MATERIAL BEING SELECTIVELY ETCHABLE WITH RESPECT TO SAID FIRST MATERIAL AND TO THE THIRD MATERIAL MENTIONED HEREINBELOW, (F) COATING SAID ETCHABLE SECOND MATERIAL WITH A SECOND LAYER OF PHOTO RESIST MATERIAL, (G) DEVELOPING ON SAID SECOND LAYER OF PHOTO RESIST MATERIAL IN ALIGNMENT WITH SAID FIRST IMAGE, A SECOND IMAGE CORRESPONDING TO AND COEXTENSIVE IN DESIGN AND AREA WITH RESPECT TO SAID FIRST IMAGE AND REMOVING THE UNEXPOSED PORTIONS OF PHOTO RESIST MATERIAL, (H) ELECTROPLATNG AS A SECOND LAYER SELECTIVELY ETCHRESISTANT THIRD MATERIAL ON SAID ETCHABLE SECOND MATERIAL WHERE SAID UNEXPOSED PORTIONS OF PHOTO RESIST MATERIAL HAVE BEEN REMOVED FROM SAID SECOND LAYER OF PHOTO RESIST MATERIAL, (I) REMOVING THE REMAINING EXPOSED PORTION OF SAID SECOND LAYER OF PHOTO RESIST, AND (J) ETCHING SAID ETCHABLE SECOND MATERIAL WITH ETCHING FLUID TO CONJOIN SAID FIRST AND SECOND IMAGES.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1968-06-28 | 1968-12-28 | 1969-06-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1972-06-28 | 1972-12-28 | 1973-06-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1976-06-28 | 1976-12-28 | 1977-06-29 | $7700.00 | Window Closed / Lapsed |