US3215570A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for manufacture of semiconductor devices
Assignee: Texas Instruments Inc
•
Filing: 1963-03-15
•
Granted: 1965-11-02
•
Expires: 1983-03-15
Abstract
No abstract record available.
Inventors
- 👤 Harland C Andrews
- 👤 Benjamin W Thomas
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 23:15
CPC Classifications
H; H10; H10P; H10P32/00; H10P32/10; H10P32/17; H10P32/171; C; C23; C23C; C23C16/00; C23C16/06; C23C16/18; C23C16/20; H10P32/14; H10P32/1404; H10P95/00; Y; Y10; Y10S; Y10S148/00; Y10S148/033
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
73 words
IN THE MANUFACTURE OF SEMICONDUCTOR DEVICES, THE STEPS OF EXPOSING A SILICON SEMICONDUCTOR BODY TO AN ATMOSPHERE CONTAINING THE VAPORS OF AN OXYGEN FREE, ORGANIC ALUMINUM COMPOUND, SAID ALUMINUM COMPOUND BEING SELECTED FROM THE GROUP CONSISTING OF TRIETHYLALUMINUM AND TRI-ISOBUTYLALUMINUM, AT A TEMPERATURE SUFFICIENT TO PRODUCE DEPOSITION OF ELEMENTAL ALUMINUM ONTO THE SEMICONDUCTOR BODY FROM THE VAPORS OF SAID COMPOUND AND HEATING SAID BODY FOR DIFFUSION OF THE DEPOSITED ALUMINUM INTO SAID BODY.
Claim 2
Dependent Claim
73 words
IN THE MANUFACTURE OF SEMICONDUCTOR DEVICES, THE STEPS OF EXPOSING A SILICON SEMICONDUCTOR BODY TO AN ATMOSPHERE CONTAINING THE VAPORS OF AN OXYGEN FREE, ORGANIC ALUMINUM COMPOUND, SAID ALUMINUM COMPOUND BEING SELECTED FROM THE GROUP CONSISTING OF TRIETHYLALUMINUM AND TRI-ISOBUTYLALUMINUM, AT A TEMPERATURE SUFFICIENT TO PRODUCE DEPOSITION OF ELEMENTAL ALUMINUM ONTO THE SEMICONDUCTOR BODY FROM THE VAPORS OF SAID COMPOUND AND HEATING SAID BODY FOR DIFFUSION OF THE DEPOSITED ALUMINUM INTO SAID BODY.
References Cited (Backward Citations)
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US2796562A
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Cited
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US3055776A
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1968-11-01 | 1969-05-03 | 1969-11-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1972-11-01 | 1973-05-03 | 1973-11-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1976-11-01 | 1977-05-03 | 1977-11-02 | $7700.00 | Window Closed / Lapsed |