US3420767A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Cathode sputtering apparatus for producing plural coatings in a confined high frequency generated discharge
Assignee: Control Data Corp
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Filing: 1966-03-03
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Granted: 1969-01-07
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Expires: 1986-03-03
Abstract
No abstract record available.
Inventors
- 👤 Willis J Carlson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 00:46
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/34; C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/3464
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
82 words
APPARATUS FOR DEPOSITING ON AT LEAST ONE SUBSTRATE SPUTTERED MATERIAL FROM A TARGET ELECTRODE, COMPRISING: A CONTAINER HOUSING A CHAMBER ENCLOSING A SPACE WITHIN SAID CONTAINER, MEANS TO MAINTAIN AN IONIZABLE GAS AT SPUTTERABLE PRESSURES WITHIN SAID CONTAINER; MEANS FOR MOVING SAID TARGET ELECTRODE INTO AND OUT OF SAID CHAMBER, MEANS FOR APPLYING ENERGY AT HIGH FREQUENCIES TO SAID CHAMBER TO IONIZE GAS WHICH IS CONFINED WITHIN THE CHAMBER WHEREBY MATERIAL IS SPUTTERED FROM SAID TARGET WHEN POSITIONED WITHIN SAID CHAMBER; AND
Claim 2
Dependent Claim
82 words
APPARATUS FOR DEPOSITING ON AT LEAST ONE SUBSTRATE SPUTTERED MATERIAL FROM A TARGET ELECTRODE, COMPRISING: A CONTAINER HOUSING A CHAMBER ENCLOSING A SPACE WITHIN SAID CONTAINER, MEANS TO MAINTAIN AN IONIZABLE GAS AT SPUTTERABLE PRESSURES WITHIN SAID CONTAINER; MEANS FOR MOVING SAID TARGET ELECTRODE INTO AND OUT OF SAID CHAMBER, MEANS FOR APPLYING ENERGY AT HIGH FREQUENCIES TO SAID CHAMBER TO IONIZE GAS WHICH IS CONFINED WITHIN THE CHAMBER WHEREBY MATERIAL IS SPUTTERED FROM SAID TARGET WHEN POSITIONED WITHIN SAID CHAMBER; AND
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1972-01-07 | 1972-07-08 | 1973-01-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1976-01-07 | 1976-07-08 | 1977-01-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1980-01-07 | 1980-07-08 | 1981-01-07 | $7700.00 | Window Closed / Lapsed |