US3549437A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of producing metal structures on semiconductor surfaces
Assignee: Siemens AG
•
Filing: 1967-02-10
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Granted: 1970-12-22
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Expires: 1987-02-10
Abstract
No abstract record available.
Inventors
- 👤 Alfred Steppberger
- 👤 Herbert Goetzeler
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 03:41
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/069; C; C23; C23C; C23C14/00; C23C14/04; C23C14/042; C23F; C23F1/00; H10W20/40; H10W20/41; H10W20/44; H10W20/4403; H10W20/4405; H10W20/4407; Y; Y10; Y10S; Y10S148/00; Y10S148/043
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
US3290753A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1973-12-21 | 1974-06-22 | 1974-12-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1977-12-21 | 1978-06-22 | 1978-12-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1981-12-21 | 1982-06-22 | 1982-12-22 | $7700.00 | Window Closed / Lapsed |