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US3569706A Expired / Lapsed US ⏱️ 0.0 years remaining

Method and apparatus for generating a continuous beam of neutral atoms

Assignee: PHYSICS TECHNOLOGY LAB Inc
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Filing: 1965-10-22
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Granted: 1971-03-09
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Expires: 1985-10-22
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Abstract

Abstract Method and apparatus for generating a continuous beam of sputtered neutral atoms that are sputtered from metallic members, condensed layers of gases, single crystals and condensed layers of gases on single crystals, and which continuous beam passes through an aperture providing a directed beam that may be restricted to neutral atoms having a monovelocity by a velocity selector means.

Inventors

  • 👤 Benjamin B Meckel
  • 👤 Bernd H Richelmann

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-30 14:41
CPC Classifications
H; H05; H05H; H05H3/00; H05H3/02

Claims Analysis

Total Claims: 4
Claim 1
Independent Claim 134 words
Apparatus for generating a continuous beam of neutral atoms from gases in preferred directions of movement and at a given speed comprising: an evacuated housing enclosing a metallic member; meanS for injecting a small amount of gas into said housing; means for condensing portions of said gas on said metallic member; means for ionizing a portion of said gas and sputtering said condensed gas by ion bombardment causing neutral atoms to be ejected therefrom; tube means aligned for receiving and passing therethrough portions of said neutral atoms to form a neutral atom beam; one end of said tube means being positioned immediately adjacent said condensed gas; and velocity selector means for receiving said beam from said tube means and passing only that portion of said neutral atoms in said beam having a given speed.
Claim 2
Independent Claim 80 words
The method of generating a continuous beam of neutral atoms from gases comprising the steps of: drawing a vacuum in a container; injecting a gas into said container; condensing a portion of said gas on a cold finger in said container; ionizing the remainder of said gas in said container creating a plasma; and generating a continuous beam of neutral atoms by using the plasma to sputter the condensed layers of gases on the cold finger surface in the vacuum.
Claim 3
Dependent Claim 41 words
The method of generating a continuous beam of neutral atoms from gases as claimed in claim 3 comprising the additional step of, moving said continuous beam of neutral atoms through a restricted opening to provide a directed beam of neutral atoms.
Claim 4
Dependent Claim 59 words
The method of generating a continuous beam of neutral atoms from gases as claimed in claim 4 including the step of, employing a velocity selector device for receiving the beam through the restricted opening and passing only those neutral atoms that have a given selected velocity, thereby producing a continuous beam of neutral atoms having a given monochromatic velocity.

References Cited (Backward Citations)

GB829783A Cited
US3333982A Cited
US3170810A Cited
US3180987A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1974-03-08 1974-09-07 1975-03-09 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1978-03-08 1978-09-07 1979-03-09 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1982-03-08 1982-09-07 1983-03-09 $7700.00 Window Closed / Lapsed

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