Cryopumping installations with high flow-rates

Claim 2

A cryopump as claimed in claim 2, in which said frustoconical walls are mounted inside said casing so as to flare outwards towards the exterior in the direction of said inlet valve.

Claim 3

A cryopump with a high flow rate as claimed in claim 1, in which said means for circulating a very cold fluid comprise a tubular coil mounted round and externally to said baffle, means said main collecting means comprising an assembly of metal plates carried by said coil.

Claim 4

A cryopump with a high flow rate as claimed in claim 1, and further comprising a reflector located at the extremity of said baffle means opposite to said inlet valve, said means for circulating a moderately cold fluid incorporating a tube for cooling said reflector.

Claim 5

A cryopump with a high flow rate as claimed in claim 1, in which said means for circulating a very cold fluid comprise a fluid at a temperature substantially of the order of 25* K, while said means for circulating a moderately cold fluid comprise a fluid at a temperature substantially of the order of 80* K.

Claim 6

A cryopump with a high flow rate as claimed in claim 1, in which an internal wall of said casing is cooled by said means for circulating a moderately cold fluid.

Claim 7

A cryopump with a high flow rate as claimed in claim 7, in which said casing is provided with a lower passage for the evacuation of liquid to the exterior, and in which said internal wall of the casing has a portion of funnel shape engaged in said liquid-evacuation passage.

Claim 8

A cryopump with a high flow rate as claimed in claim 7, in which said casing is provided with a lower passage for the evacuation of gases towards the exterior, and in which said internal wall of the cAsing is adapted to form a dome perforated laterally above said gas-evacuation passage.

Claim 9

A cryopumping installation with a high flow rate, comprising at least two cryopumps each including a fluidtight casing thermally insulated from the exterior and having a wide inlet passage, an inlet valve associated with said passage, gas collection means comprising baffle means formed by an assembly of walls of annular form arranged at a distance from each other along a common axis in the extension of the axis of said inlet valve, said baffle means having an internal diameter substantially close to that of said inlet passage and main collecting means disposed externally of and around said baffle means, means for circulating a moderately cold fluid for said baffle means and a very cold fluid for said main collecting means, a single chamber to be exhausted coupled to each said pump by means of each of said inlet valves, a double flux cryogenerator supplying said means for circulating moderately cold and very cold fluids, stop valves on said circulating means, a pumping group, coupling means incorporating stop valves between said pumping group and each said cryopump, a prevacuum pump, coupling means including stop valves between said prevacuum group and each said cryopump, and means for recovery of liquids adapted to cooperate with said means for circulating the moderately cold fluid.

Claim 10

A cryopump with a high flow rate as claimed in claim 1, said annular baffle means being so shaped and disposed as to direct gas from within said annular baffle means radially outwardly toward said main collecting means.

Claim 11

A cryopump with a high flow rate as claimed in claim 11, in which said main collecting means comprises a large number of metal plates.