US3615943A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Deposition of doped and undoped silica films on semiconductor surfaces
Assignee: Individual
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Filing: 1969-11-25
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Granted: 1971-10-26
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Expires: 1989-11-25
Abstract
Abstract Deposition of a silica film on a semiconductor surface is effected by applying, on the surface, a thin film of a solution of silicon acetate in an inert solvent, and heating the coated surface at a temperature and for a period of time adequate to decompose the acetate to a glassy silica film. Such a silicon acetate solution may contain a soluble dopant which, upon evaporation of the solvent and heating to diffusion temperature, will enable the dopant to diffuse into any exposed semiconductor surfaces. The silicon acetate used in this invention may be one of the compounds having the following general formula: IN WHICH R is a substituent of the class consisting of an acetate or a vinyl group.
Inventors
- 👤 Milton Genser
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 22:51
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/69; H10P14/692; H10P14/6921; H10P14/69215; C; C04; C04B; C04B41/00; C04B41/45; C04B41/50; C04B41/5076; C04B41/5089; H10P14/63; H10P14/6326; H10P14/6342; H10P14/66; H10P14/668; H10P14/6681; H10P14/6684; H10P14/6686; H10P32/00; H10P32/10; H10P32/14; H10P32/1408; H10P32/141; H10P32/17; H10P32/171; H10P32/174; H10P32/18; H10P95/00; C04B2111/00; C04B2111/00474; C04B2111/00844
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
39 words
The process according to claim 1 in which said compound solution contains a soluble dopant compound, and heating said coated surface to a temperature and for a time sufficient to permit said dopant to diffuse into said semiconductor surface.
Claim 2
Dependent Claim
15 words
The process, according to claim 1, in which the silicon acetate compound is silicon tetra-acetate.
Claim 3
Dependent Claim
16 words
The process, according to claim 1, in which the silicon acetate compound is vinyl triacetoxy silane.
Claim 4
Dependent Claim
22 words
The method, according to claim 1, wherein the inert solvent is an anhydrous aliphatic alcohol having no more than four carbon atoms.
Claim 5
Dependent Claim
29 words
The method, according to claim 1, in which the coated surface is heated at about 225* C. to about 275* C. for about 10 minutes to about one-half hour.
Claim 6
Dependent Claim
86 words
The method, according to claim 1, wherein said coated surface is provided with holes penetrating said coating, applying on said coating and penetrated surface a thin film of a solution of silicon acetate in an inert solvent and containing a dissolved dopant chemical, heating said recoated surface to a temperature and for a period of time sufficient to permit diffusion of the dopant atoms into the semiconductor surface through said holes, and removing both coatings so as to leave a bare semiconductor surface having doped regions.
Claim 7
Dependent Claim
29 words
The method, according to claim 7, in which the recoated surface is heated at about 1000 * C. to about 1200* C. for about 10 minutes to one-half hour.
Claim 8
Dependent Claim
83 words
The method, according to claim 1, in which said compound contains a soluble dopant compound, applying a screen to the glassy layer to screen out portions of the semiconductor surface to be doped, dissolving away the glassy surface containing dopant from the unscreened portions of the surface, coating the thus-treated surface with a thin layer of dopant-free silicon acetate compound, and heating the latter surface to a temperature and for a time sufficIent to permit said dopant to diffuse into said semiconductor surface.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-10-25 | 1975-04-26 | 1975-10-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-10-25 | 1979-04-26 | 1979-10-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-10-25 | 1983-04-26 | 1983-10-26 | $7700.00 | Window Closed / Lapsed |