US3623218A
Expired / Lapsed
US
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Method for determining depth of lapping of dielectrically isolated integrated circuits
Assignee: Signetics Corp
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Filing: 1969-01-16
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Granted: 1971-11-30
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Expires: 1989-01-16
Abstract
Abstract METHOD AND STRUCTURE FOR DETERMINING THE DEPTH OF LAPPING OF DIELECTRICALLY ISOLATED INTEGRATED CIRCUITS UTILIZING AS LEAST TWO ETCHED RECESSES WHICH ARE GENERALLY VSHAPED IN CROSS-SECTION AND WHICH HAVE APEXES AT DIFFERENT ELEVATIONS.
Inventors
- 👤 Hajime Mitarai
- 👤 Carroll E Nelson
- 👤 Albert P Younmans
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 02:51
CPC Classifications
H; H10; H10D; H10D84/00; H10D84/60; H10D84/611; H10D84/613; H10P; H10P52/00; H10P95/00; Y; Y10; Y10S; Y10S148/00; Y10S148/049; Y10S148/051; Y10S148/085; Y10S148/115; Y10S438/00; Y10S438/973
Claims Analysis
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References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-11-29 | 1975-05-31 | 1975-11-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-11-29 | 1979-05-31 | 1979-11-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-11-29 | 1983-05-31 | 1983-11-30 | $7700.00 | Window Closed / Lapsed |