US3681227A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Microcircuit mask and method
Assignee: Corning Glass Works
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Filing: 1970-06-29
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Granted: 1972-08-01
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Expires: 1990-06-29
Abstract
Abstract A METHOD OF MAKING THIN FILMS OF ALPHA FE2O3 BY A REACTIVE SPUTTERING TECHNIQUE, THE PARAMETERS OF WHICH ARE CONTROLLED WITHIN SPECIFIED RANGES SO THAT THE RESULTANT FILM HAS GREATER OPTICAL AND PHYSICAL DENSITY, GREATER SCRATCH AND ABRASION RESISTANCE AND HIGHER REFRACTIVE INDEX CONVENTIONAL REACTIVE SPUTTERING. THE IMPROVED IRON OXIDE FILM HAVING A THICKNESS IN THE RANGE OF 500 A. TO 5000A. MAY BE DEPOSITED ON A TRANSPARENT GLASS SUBSTRATE AND THEREAFTER BE PATTERNED TO FORM A MICROCIRCUIT MASK HAVING IMPROVED PROPERTIES.
Inventors
- 👤 Raymond E Szupillo
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 14:39
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/54; C; C23; C23C; C23C14/00; C23C14/04; C23C14/06; C23C14/08; C23C14/085; H; H10; H10P; H10P95/00
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-08-01 | 1976-01-31 | 1976-08-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-08-01 | 1980-01-31 | 1980-08-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-08-01 | 1984-01-31 | 1984-08-01 | $7700.00 | Window Closed / Lapsed |