US3692572A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Epitaxial film process and products thereof
Assignee: Individual
•
Filing: 1969-08-12
•
Granted: 1972-09-19
•
Expires: 1989-08-12
Abstract
Abstract A PROCESS FOR PRODUCING EPITAXIAL FILMS COMPRISING REACTING A CRYSTALLINE SOURCE MATERIAL WITH A GASEOUS REAGENT AT A FIRST TEMPERATURE TO FORM VAPOR PHASE REACTION PRODUCTS AND EXPOSING A SUBSTRATE TO THE REACTION PRODUCTS A A SECOND LOWER TEMPERATURE TO GRWO AN EPITAXIAL FILM ON THE SUBSTRATE. AND, THE PROCESS FURTHER COMPRISING REFLECTIVE COATING AT LEAST ONE FILM SURFACE AND ONE OTHER SURFACE OF EITHER THE FILM, SUBSTRATE, OR AN ATTACHED SUPPORT TO FORM A RESONANT CAVITY. PRODUCTS ACCORDING TO THE PROCESS DESCRIBED.
Inventors
- 👤 Wolfgang Strehlow
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 23:49
CPC Classifications
H; H01; H01S; H01S5/00; H01S5/30; Y; Y10; Y10S; Y10S148/00; Y10S148/135
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-09-19 | 1976-03-20 | 1976-09-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-09-19 | 1980-03-20 | 1980-09-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-09-19 | 1984-03-20 | 1984-09-19 | $7700.00 | Window Closed / Lapsed |