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US3702399A Expired / Lapsed US ⏱️ 0.0 years remaining

Specimen stage for an electron microscope

Assignee: Associated Electrical Industries Ltd
•
Filing: 1971-08-03
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Granted: 1972-11-07
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Expires: 1991-08-03
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Abstract

Abstract A specimen stage for an electron microscope which allows tilting and translation of the specimen. The translation does not shift the tilt axes. Thus, once the point of intersection of the tilt axes is aligned with the optical axis, it will remain aligned irrespective of subsequent translation of the specimen. Thus, tilting of the specimen will not affect the field of view. The stage comprises first and second gimbals, the second gimbal carrying a specimen mounting. The second gimbal can be translated with respect to the first gimbal along the second gimbal axis. The specimen mounting can be translated with respect to the second gimbal in a direction inclined to the second gimbal axis. In a preferred embodiment, the first gimbal is a tube, and the second gimbal is an annulus supported within the tube.

Inventors

  • 👤 Jeffrey Harvey Lucas

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-30 17:24
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/02; H01J37/20

Claims Analysis

Total Claims: 10
Claim 1
Independent Claim 137 words
In an electron microscope comprising a source of electrons for producing a beam of electrons directed generally along an electron optical axis, and a specimen stage for supporting and controlling the position of a specimen in said beam, the specimen stage comprising: a support; first gimbal means pivotally carried by said support for rotation about a first axis; second gimbal means pivotally carried by said first gimbal means for rotation about a second axis which is inclined to and intersects said first axis; specimen mounting means carried by said second gimbal means; means for translating said second gimbal means relative to said first gimbal means in a direction parallel to said second gimbal axis; and means for translating said specimen mounting means relative to said second gimbal means in a direction inclined to said second gimbal axis.
Claim 2
Dependent Claim 137 words
In an electron microscope comprising a source of electrons for producing a beam of electrons directed generally along an electron optical axis, and a specimen stage for supporting and controlling the position of a specimen in said beam, the specimen stage comprising: a support; first gimbal means pivotally carried by said support for rotation about a first axis; second gimbal means pivotally carried by said first gimbal means for rotation about a second axis which is inclined to and intersects said first axis; specimen mounting means carried by said second gimbal means; means for translating said second gimbal means relative to said first gimbal means in a direction parallel to said second gimbal axis; and means for translating said specimen mounting means relative to said second gimbal means in a direction inclined to said second gimbal axis.
Claim 3
Dependent Claim 16 words
A specimen stage according to claim 1 wherein said first gimbal means comprises a tubular member.
Claim 4
Dependent Claim 20 words
A specimen stage according to claim 2 wherein said tubular member is removable from the remainder of the specimen stage.
Claim 5
Dependent Claim 20 words
A specimen stage according to claim 2 wherein said first axis is the axis of symmetry of said tubular member.
Claim 6
Dependent Claim 21 words
A specimen stage according to claim 2 wherein said second gimbal means comprises an annular member mounted within said tubular member.
Claim 7
Dependent Claim 53 words
A specimen stage according to claim 1 wherein said second gimbal means is pivotally mounted on said first gimbal means by means of journals which are supported in bearings, said journals being axially slidable within said bearings so as to allow translation of the second gimbal means relative to the first gimbal means.
Claim 8
Dependent Claim 50 words
A specimen stage according to claim 1 wherein said means for translating the specimen mounting means relative to said second gimbal means includes a push rod slidable along said second axis, and means for converting movement of said push rod into movement in said direction inclined to said second axis.
Claim 9
Dependent Claim 45 words
A specimen stage according to claim 1 wherein said support is mounted in the electron microscope so as to be movable in a plane transverse to the electron optical axis, whereby the point of intersection of said axes may be aligned with the optical axis.
Claim 10
Dependent Claim 12 words
An electron microscope including a specimen stage as claimed in claim 1.

References Cited (Backward Citations)

US3435210A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1975-11-07 1976-05-08 1976-11-07 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1979-11-07 1980-05-08 1980-11-07 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1983-11-07 1984-05-08 1984-11-07 $7700.00 Window Closed / Lapsed

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