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US3733483A Expired / Lapsed US ⏱️ 0.0 years remaining

Electron spectroscopy

Assignee: Kratos Analytical Ltd
•
Filing: 1971-02-26
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Granted: 1973-05-15
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Expires: 1991-02-26
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Abstract

Abstract An electron spectroscopy apparatus has an analyzer and a retardation lens system. In a first mode of operation, no retardation is applied, and the analyzer scans a low-energy range of the energy spectrum. In a second mode, retardation is applied, and the analyzer scans a high-energy range. The retardation is varied in synchronism with the scanning of the analyzer, so as to maintain a constant retardation factor.

Inventors

  • 👤 B Green
  • 👤 J Watson

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-30 21:34
CPC Classifications
H; H01; H01J; H01J49/00; H01J49/44; H01J49/46; H01J49/48; H01J49/484

Claims Analysis

Total Claims: 11
Claim 1
Independent Claim 112 words
Apparatus for use in electron spectroscopy for chemical analysis of a sample, comprising: a. means for irradiating the sample to release electrons from the sample; b. an energy analyzer for analyzing the energies of said electrons released from the sample; c. scan control means for causing said analyzer to scan through the energy spectrum of said electrons; and, d. retarding means for producing retardation of said electrons before they enter the analyzer, the retarding means being controlled by said scan control means in synchronism with the scan of the analyzer to vary said retardation proportionally with the energy of the electrons in the part of said spectrum being scanned by said analyzer.
Claim 2
Dependent Claim 112 words
Apparatus for use in electron spectroscopy for chemical analysis of a sample, comprising: a. means for irradiating the sample to release electrons from the sample; b. an energy analyzer for analyzing the energies of said electrons released from the sample; c. scan control means for causing said analyzer to scan through the energy spectrum of said electrons; and, d. retarding means for producing retardation of said electrons before they enter the analyzer, the retarding means being controlled by said scan control means in synchronism with the scan of the analyzer to vary said retardation proportionally with the energy of the electrons in the part of said spectrum being scanned by said analyzer.
Claim 3
Dependent Claim 40 words
Apparatus according to claim 1 wherein said energy analyzer comprises a pair of electrodes between which said electrons pass, and means for applying a voltage between said electrodes so as to deflect electrons by different amounts according to their energies.
Claim 4
Dependent Claim 21 words
Apparatus according to claim 2 wherein said scan control means comprises means for sweeping said voltage through a range of values.
Claim 5
Dependent Claim 33 words
Apparatus according to claim 3 wherein said retarding means comprises an electrostatic lens system, and means for applying a control voltage thereto proportional to the voltage applied between the electrodes of the analyzer.
Claim 6
Independent Claim 101 words
A method of electron spectroscopy for chemical analysis of a sample, comprising the steps of: a. irradiating the sample so as to release electrons from the sample; b. passing said electrons into an energy analyzer and operating said analyzer to scan through the energy spectrum of said electrons released from the sample; and, c. concurrently with operation of said analyzer, producing retardation of the electrons before they enter the analyzer and varying said retardation in synchronism with the scan of the analyzer and proportionally with the energy of the electrons in the part of said spectrum being scanned by said analyzer.
Claim 7
Independent Claim 101 words
A method of electron spectroscopy for chemical analysis of a sample, comprising the steps of: a. irradiating the sample so as to release electrons from the sample; b. passing said electrons into an energy analyzer and operating said analyzer to scan through the energy spectrum of said electrons released from the sample; and, c. concurrently with operation of said analyzer, producing retardation of the electrons before they enter the analyzer and varying said retardation in synchronism with the scan of the analyzer and proportionally with the energy of the electrons in the part of said spectrum being scanned by said analyzer.
Claim 8
Independent Claim 119 words
A method of electron spectroscopy for chemical analysis of a sample, comprising the steps of: a. irradiating the sample so as to release electrons from the sample; b. forming said electrons into a beam; c. passing said beam of electrons into an energy analyzer substantially without retardation, and operating said analyzer to scan a first energy range of the energy spectrum of said electrons released from the sample; d. retarding said beam of electrons so that the electrons therein have lower energies than they had on being released from said sample; and, e. passing the retarded beam of electrons into said energy analyzer and operating said analyzer to scan a second, relatively higher energy range of said energy spectrum.
Claim 9
Independent Claim 119 words
A method of electron spectroscopy for chemical analysis of a sample, comprising the steps of: a. irradiating the sample so as to release electrons from the sample; b. forming said electrons into a beam; c. passing said beam of electrons into an energy analyzer substantially without retardation, and operating said analyzer to scan a first energy range of the energy spectrum of said electrons released from the sample; d. retarding said beam of electrons so that the electrons therein have lower energies than they had on being released from said sample; and, e. passing the retarded beam of electrons into said energy analyzer and operating said analyzer to scan a second, relatively higher energy range of said energy spectrum.
Claim 10
Dependent Claim 30 words
A method according to claim 6, wherein during said steps said beam of electrons is brought to a focus before entering said analyzer, with a substantially unit electron optical magnification.
Claim 11
Dependent Claim 68 words
A method according to claim 6 wherein, during the step of scanning said first energy range said beam of electrons is brought to a focus before entering said analyzer, with a substantially unit electron optical magnification, and during the step of scanning said second energy range said beam of electrons is brought to a focus before entering said analyzer with an electron optical magnification substantially greater Than unity.

References Cited (Backward Citations)

US3617741A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1976-05-14 1976-11-13 1977-05-15 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1980-05-14 1980-11-13 1981-05-15 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1984-05-14 1984-11-13 1985-05-15 $7700.00 Window Closed / Lapsed

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