US3758214A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and apparatus for the automatic measurement of distances such as line width or edge distances of small objects
Assignee: Siemens AG
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Filing: 1971-11-24
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Granted: 1973-09-11
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Expires: 1991-11-24
Abstract
Abstract A method and apparatus for automatic measurement of distances such as line width or edge dimensions of small objects, utilizing an optical system, for example a microscope, in which the resulting image is transferred to the photo-sensitive layer of a vidicon tube of a television camera and dissected thereby into picture lines for evaluation, in which the number of predetermined pulses suitably produced during the scanning from one end to the other of a calibrated distance, and the number of pulses so produced during the scanning of a distance to be measured are respectively counted and the quotient of the pulse totals so obtained is multiplied by a factor derived from the optical and electrical constants involved in the respective optical and electrical systems utilized.
Inventors
- 👤 D Mangelsdorf
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 05:51
CPC Classifications
G; G01; G01B; G01B11/00; G01B11/14; G01B11/02; G01B11/022
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
142 words
A method for automatic measurement of distances such as line width, or edge dimensions of small objects, utilizing an optical system, in which the resulting image is transferred to the photosensitive layer of a vidicon tube of a television camera and dissected thereby into picture lines for evaluation, comprising the steps of providing, with the object image, an image of a calibrated distance, producing a series of relatively uniform pulses, counting the number of pulses produced during scanning from one end to the other of said calibrated distance to form a total NA, counting the number of pulses produced during the scanning of the distance to be measured to form a total NB and multiplying the quotient of the two pulse totals NB/NA by a factor derived from the optical and electrical constants involved in the respective optical and electrical systems employed.
Claim 2
Independent Claim
142 words
A method for automatic measurement of distances such as line width, or edge dimensions of small objects, utilizing an optical system, in which the resulting image is transferred to the photosensitive layer of a vidicon tube of a television camera and dissected thereby into picture lines for evaluation, comprising the steps of providing, with the object image, an image of a calibrated distance, producing a series of relatively uniform pulses, counting the number of pulses produced during scanning from one end to the other of said calibrated distance to form a total NA, counting the number of pulses produced during the scanning of the distance to be measured to form a total NB and multiplying the quotient of the two pulse totals NB/NA by a factor derived from the optical and electrical constants involved in the respective optical and electrical systems employed.
Claim 3
Dependent Claim
41 words
A method according to claim 1, wherein said calibrated distance is disposed in the intermediate picture plane of the optical system and images of both the calibrated distance and the object are focussed by said optical system on said photo-sensitive layer.
Claim 4
Dependent Claim
39 words
A method according to claim 1, comprising the additional step of forming an image of said calibrated distance independently of the formation of the image of said distance to be measured and focussing both images on said photo-sensitive layer.
Claim 5
Independent Claim
164 words
An apparatus for automatic measurement of distances such as line width or edge dimensions of a small object, comprising an optical system, operable to produce an image of the distance to be measured which image is transferred to a photo-sensitive layer of a vidicon tube of a television camera operative to scan and dissect such image into picture lines for evaluation, means for producing on said photo-sensitive layer an image of a calibrated distance, means for producing relatively uniform pulses, means for counting the total number of pulses produced during scanning from one end to the other of said calibrated distance, and means for counting the total number of pulses produced during the scanning of the distance to be measured, calculating means responsive to said pulses for forming the quotient of said totals and means operable to multiply the quotient of the two pulse totals by a factor derived from the optical and electrical constant involved in the respective optical and electrical systems employed.
Claim 6
Independent Claim
164 words
An apparatus for automatic measurement of distances such as line width or edge dimensions of a small object, comprising an optical system, operable to produce an image of the distance to be measured which image is transferred to a photo-sensitive layer of a vidicon tube of a television camera operative to scan and dissect such image into picture lines for evaluation, means for producing on said photo-sensitive layer an image of a calibrated distance, means for producing relatively uniform pulses, means for counting the total number of pulses produced during scanning from one end to the other of said calibrated distance, and means for counting the total number of pulses produced during the scanning of the distance to be measured, calculating means responsive to said pulses for forming the quotient of said totals and means operable to multiply the quotient of the two pulse totals by a factor derived from the optical and electrical constant involved in the respective optical and electrical systems employed.
Claim 7
Dependent Claim
40 words
An apparatus according to claim 4, comprising space markers defining therebetween said calibrated distance, said markers being disposed in an intermediate picture plane of the optical system and thereby focussed with the distance to be measured on said photo-sensitive layer.
Claim 8
Dependent Claim
45 words
An apparatus according to claim 5, comprising a frame member defining the field of measurement in said optical system, said spaced markers being disposed on said frame, and means for illuminating said markers to provide a sharp light-contrast on said photo-sensitive layer at said markers.
Claim 9
Dependent Claim
27 words
An apparatus according to claim 6, wherein said illuminating means comprises a light source and light-conductive fibers arranged to conduct light from said source to said markers.
Claim 10
Dependent Claim
31 words
An apparatus according to claim 5, wherein two sets of markers are provided, defining calibrated distances extending orthogonally relative to each other, for use with a horizontal and vertical deflection transposition.
Claim 11
Dependent Claim
49 words
An apparatus according to claim 4, wherein said calibrated distance is remotely disposed from said optical system, said calibrated distance being defined by respective markers, an optical system for producing an image of such calibrated distance, and means for bringing such image to a focus on said photo-sensitive layer.
Claim 12
Dependent Claim
51 words
An apparatus according To claim 9, wherein said means for bringing said image to such a focus comprises a partially reflective mirror disposed to intersect both optical systems, operative to effect a focus of one of said images by reflection from said mirror and the other by passage through said mirror.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-09-10 | 1977-03-12 | 1977-09-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-09-10 | 1981-03-12 | 1981-09-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-09-10 | 1985-03-12 | 1985-09-11 | $7700.00 | Window Closed / Lapsed |